Effect of Al 2 O 3 ALD coating and vapor infusion on the bulk mechanical response of elastic and viscoelastic polymers

McClure, Christina D.; Oldham, Christopher J.; Parsons, Gregory N.

doi:10.1016/j.surfcoat.2014.10.029

Cited by 26 publications

(14 citation statements)

References 27 publications

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“…Sequential infiltration synthesis (SIS) has been demonstrated to be a viable preparation route for hybrid inorganic-organic materials, by penetrating of gaseous metal precursors into polymer films, fibers, foams, or biomaterials [1][2][3][4][5] . The incorporation of inorganic materials into organic matrices offers the possibility to enhance the mechanical properties of the final composite [6][7][8] , to improve its chemical etch resistance 9,10 , to tune its optical properties 11 , or its oil sorption capability for efficient extraction of oil from water 3 . In particular, infiltration in lithographically patterned polymeric thin films 12,13 or in self-assembled block copolymer (BCP) films 9,14,15 allows the formation of inorganic nanostructures, once the polymer matrix is removed by an O2 plasma or annealing step.…”

Section: Introductionmentioning

confidence: 99%

Trimethylaluminum Diffusion in PMMA Thin Films during Sequential Infiltration Synthesis: In Situ Dynamic Spectroscopic Ellipsometric Investigation

Cianci¹,

Nazzari

Seguini³

et al. 2018

Adv Materials Inter

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Sequential infiltration synthesis (SIS) provides a successful route to grow inorganic materials into polymeric films by penetrating of gaseous precursors into the polymer, both in order to enhance the functional properties of the polymer creating an organic-inorganic hybrid material, and to fabricate inorganic nanostructures when infiltrating in patterned polymer films or in selfassembled block copolymers. A SIS process consists in a controlled sequence of metal organic precursor and co-reactant vapor exposure cycles of the polymer films in an atomic layer deposition (ALD) reactor. In this work, we present a study of the SIS process of alumina using trimethylaluminum (TMA) and H2O in various polymer films using in situ dynamic spectroscopic ellipsometry (SE). In situ dynamic SE enables time-resolved monitoring of the swelling of the polymer, which is relevant to the diffusion and retain of the metal precursor into the polymer itself. Different swelling behaviour of poly(methylmethacrylate) (PMMA) and polystyrene (PS) was observed when exposed to TMA vapor. PMMA films swell more significantly than PS films do, resulting in very different infiltrated Al2O3 thickness after polymer removal in O2 plasma. PMMA films reach different swollen states upon TMA exposure and reaction with H2O, depending on the TMA dose and on the purge duration after TMA exposure, which correspond to different amounts of metal precursor retained inside the polymer and converted to alumina. Diffusion coefficients of TMA in PMMA were extracted investigating the swelling of pristine PMMA films during TMA infiltration and shown to be dependent on polymer molecular weight. In situ dynamic SE monitoring allows to control the SIS process tuning it from an ALD-like process for long purge to a chemical vapour deposition-like process selectively confined inside the polymer films.

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Section: Introductionmentioning

confidence: 99%

Trimethylaluminum Diffusion in PMMA Thin Films during Sequential Infiltration Synthesis: In Situ Dynamic Spectroscopic Ellipsometric Investigation

Cianci¹,

Nazzari

Seguini³

et al. 2018

Adv Materials Inter

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“…[ 78,103 ] McClure et al investigate how ALD Al 2 O 3 coatings formed at low temperatures (<100 °C) modify bulk mechanical properties of PP, nylon‐6, and Pellethane elastomer. [ 78 ] For the first ≈200 ALD cycles, the Al 2 O 3 treatment tends to increase Young’s modulus, especially for the nylon‐6 and elastomer, consistent with the expected polymer/precursor reactivity. However, the ALD coating generally embrittles the polymers, causing them to rupture under smaller applied strain.…”

Section: Discussion and Perspectivesmentioning

confidence: 99%

“…The homogeneous and spotless nanometer‐level thickness Al 2 O 3 significantly enhances the hydrophilicity, polarity, and reactivity of the originally inert PP film surface, while protecting the integrity and original structure of the PP substrate. Moreover, McClure et al [ 78 ] explained the effect of ALD Al 2 O 3 in the enhancements of PP film mechanical strength. Such changes are dominated by precursor diffusion into and subsequently Al 2 O 3 nucleation and growth inside PP thin films, which are adjustable by changing ALD temperature, precursor dose duration, and ALD cycles.…”

Section: Ald Coating For Energy Storage and Membranesmentioning

confidence: 99%

Atomic Layer Deposition for Polypropylene Film Engineering—A Review

Song

2020

Macro Materials & Eng

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Polypropylene (PP) polymers are used extensively as dielectric layers, packaging films, and separation membranes, etc. Structure, chemistry, and surface features of PP films dominate their performance and durability. Modification of PP films is carried out using atomic layer deposition (ALD) among other techniques to coat uniform layer of nanometer inorganic material on the surface and inside the pores of PP films to serve the purpose of target applications better. Controlling the reaction temperature, precursor pulsing time, and number of cycles during deposition predominate the thickness, morphology, and composition of the coated layer and hence the performance of PP films. Overall, the ALD technique has been proven to be advantageous in advancing PP film properties such as hydrophilicity, UV resistance, membrane separators, dielectric and mechanical strength, etc., primarily through the controllable formation of nanometer coating on PP films. This review discusses the recent advancements and prospective of ALD in the modification and functionalization of PP films for various applications to provide some insights and motivations to design high‐performance novel PP films by well leveraging the ALD technique.

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“…As efficient alternative to solution-based methods vapor phase techniques have proven being advantageous for achieving an incorporation of metals into polymers and in this way resulting in the fabrication of hybrid materials with improved mechanical properties. [8][9][10] The recently developed vapor phase inltration (VPI) process offers a pathway to hybridize polymeric substrates with inorganic materials even aer the nal shape has been fabricated. 11 VPI is derived from atomic layer deposition (ALD), 12,13 a vapor phase coating methodology based on sequential exposure of a substrate to two reactants (precursors), with intermediate purging steps.…”

Section: Introductionmentioning

confidence: 99%

SCIP: a new simultaneous vapor phase coating and infiltration process for tougher and UV-resistant polymer fibers

et al. 2020

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The physical properties of polymers can be significantly altered by blending them with inorganic components. This can be done during the polymerization process, but also by post-processing of already shaped materials, for example through coating by atomic layer deposition (ALD) or hybridizing through vapor phase infiltration (VPI), both of which are beneficial in their own way. Here, a new processing strategy is presented, which allows distinct control of the coating and infiltration. The process is a hybrid VPI and ALD process, allowing separate control of infiltrated and coated components. This new simultaneous vapor phase coating and infiltration process (SCIP) enhances the degrees of freedom for optimizing the properties of polymers, as shown on the example of Kevlar 29 fibers. The SCIP treated fibers show an increase of 17% of their modulus of toughness (MOT) in comparison to native Kevlar, through the nanoscale coating with alumina. At the same time their intrinsic sensitivity to 24 hours UVirradiation was completely suppressed through another infiltrated material, zinc oxide, which absorbs the UV irradiation in the subsurface area of the fibers. Fig. 2 Mechanical properties comparison. Comparison of the mechanical properties of untreated Kevlar fibers and fibers after infiltration (I-Al 2 O 3 ) or coating (C-Al 2 O 3 ) with Al 2 O 3 and after infiltration with ZnO and simultaneous coating with Al 2 O 3 (SCIP). (A) Modulus of toughness before and after irradiation with UV light (all values are averaged from 7 samples and the error bars correspond to the standard error) C-ZnO and I-ZnO refer to sample processed in earlier work, 6 and (B) stress-strain curves before and after irradiation with UV light.This journal is

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Effect of Al 2 O 3 ALD coating and vapor infusion on the bulk mechanical response of elastic and viscoelastic polymers

Cited by 26 publications

References 27 publications

Trimethylaluminum Diffusion in PMMA Thin Films during Sequential Infiltration Synthesis: In Situ Dynamic Spectroscopic Ellipsometric Investigation

Trimethylaluminum Diffusion in PMMA Thin Films during Sequential Infiltration Synthesis: In Situ Dynamic Spectroscopic Ellipsometric Investigation

Atomic Layer Deposition for Polypropylene Film Engineering—A Review

SCIP: a new simultaneous vapor phase coating and infiltration process for tougher and UV-resistant polymer fibers

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