2006
DOI: 10.1016/j.tsf.2006.08.012
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Effect of amorphous Si layer on the reaction of carbon and silicon in the C/Si multilayer by high vacuum annealing

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Cited by 18 publications
(12 citation statements)
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“…As attested by the focus on the 1200-1750 cm −1 range in the Figure 5, the spectra display the carbon D and G band peaks at around 1350 and 1580 cm −1 , respectively. These results are consistent with previous studies [27][28][29][30]. The G-band is characteristic of graphitic sheets, and the D-band is attributed to the presence of defects in the hexagonal graphitic structure.…”
Section: Morphological Analysis Of the 2d And 3d Electrodessupporting
confidence: 93%
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“…As attested by the focus on the 1200-1750 cm −1 range in the Figure 5, the spectra display the carbon D and G band peaks at around 1350 and 1580 cm −1 , respectively. These results are consistent with previous studies [27][28][29][30]. The G-band is characteristic of graphitic sheets, and the D-band is attributed to the presence of defects in the hexagonal graphitic structure.…”
Section: Morphological Analysis Of the 2d And 3d Electrodessupporting
confidence: 93%
“…For example, the position of the observed peak is centered on (196, 226, and 285) nm after (15,30, and 60) min of sonication, respectively. This leads to a lower main particles diameter value obtained after 15 min, which seems to be much quicker than with the NMP solvent.…”
Section: Analysis Of the Solutions By Dlsmentioning
confidence: 99%
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“…Since our CNTs were multi-wall and had defects, this is not unexpected; but it also points out a significant advantage to the LPCVD process. The film grows as part of a thermally induced chemical reaction sequence that initially takes place on the surface of the CNT [25,26]. This reaction sequence occurs by the adsorption of SiH 4 to the CNT surface and subsequent pyrolysis to chemisorbed Si.…”
Section: Resultsmentioning
confidence: 99%
“…The conventional CVD crystalline SiC (c-SiC) film was formed at 1200°C or more [8][9][10][11] while the PVD deposited SiC film was amorphous at lower temperature. Chung and Wu [12] reported that post-annealing threelayer a-Si/C/a-Si structure could reduce the formation temperature of c-SiC together with C and Si to 900 ºC. The high-temperature deposition of film on the Si substrate may change the microstructure.…”
Section: Introductionmentioning
confidence: 99%