2023
DOI: 10.1016/j.materresbull.2023.112397
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Effect of annealing atmosphere on MgO thin film for tunneling magnetoresistance sensor

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“…[ 21 ] This opens up a wide variety of possibilities for its use since it has a high optical bandgap (4‐6 eV) allowing for a higher transparency. [ 22–24 ] MgO has been developed as a thin film using different processes such as spray, [ 25 ] sol‐gel, [ 26 ] sputtering, [ 27 ] and chemical vapor deposition [ 28 ] techniques. In addition, ALD has been widely used for the growth of MgO thin films since the 1990s due to its precise growth control of conformal and uniform thin films as a result of the self‐limiting, surface, and sequential reactions.…”
Section: Introductionmentioning
confidence: 99%
“…[ 21 ] This opens up a wide variety of possibilities for its use since it has a high optical bandgap (4‐6 eV) allowing for a higher transparency. [ 22–24 ] MgO has been developed as a thin film using different processes such as spray, [ 25 ] sol‐gel, [ 26 ] sputtering, [ 27 ] and chemical vapor deposition [ 28 ] techniques. In addition, ALD has been widely used for the growth of MgO thin films since the 1990s due to its precise growth control of conformal and uniform thin films as a result of the self‐limiting, surface, and sequential reactions.…”
Section: Introductionmentioning
confidence: 99%