Effect of Annealing Temperature on Platinum/YSZ Thin Film Fabricated Using RF and DC Magnetron Sputtering

Nurhamizah, A.R.; Ibrahim, Zuhairi; Muhammad, Rosnita; Wahab, Yussof; Sakrani, Samsudi

doi:10.4028/www.scientific.net/ssp.268.229

Cited by 3 publications

(2 citation statements)

References 10 publications

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“…Jaccoud et al [ 10 ] found that the Pt electrode prepared by Pt slurry had better electrochemical performance than that prepared by sputtering. Nurhamizah [ 13 ] found that the Pt electrode with porous structure has better electrochemical performance. Boer [ 14 ] and Xia [ 15 ] found that a certain proportion of YSZ powder in the Pt slurry could improve the porous structure of the Pt electrode and improve the adhesion of the Pt electrode to the YSZ electrolyte.…”

Section: Introductionmentioning

confidence: 99%

Effect of Sintering Temperature on Adhesion Property and Electrochemical Activity of Pt/YSZ Electrode

et al. 2022

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The (Pt/YSZ)/YSZ sensor unit is the basic component of the NOx sensor, which can detect the emission of nitrogen oxides in exhaust fumes and optimize the fuel combustion process. In this work, the effect of sintering temperature on adhesion property and electrochemical activity of Pt/YSZ electrode was investigated. Pt/YSZ electrodes were prepared at different sintering temperatures. The microstructure of the Pt/YSZ electrodes, as well as the interface between Pt/YSZ electrode and YSZ electrolyte, were observed by SEM. Chronoamperometry, linear scan voltammetry, and AC impedance were tested by the electrochemical workstation. The results show that increasing the sintering temperature (≤1500 °C) helped to improve adhesion property and electrochemical activity of the Pt/YSZ electrode, which benefited from the formation of the porous structure of the Pt/YSZ electrode. For the (Pt/YSZ) electrode/YSZ electrolyte system, O2− in YSZ is converted into chemisorbed O2 on Pt/YSZ, which is desorbed into the gas phase in the form of molecular oxygen; this process could be the rate-controlling step of the anodic reaction. Increasing the sintering temperature (≤1500 °C) could reduce the reaction activation energy of the Pt/YSZ electrode. The activation energy reaches the minimum value (1.02 eV) when the sintering temperature is 1500 °C.

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Section: Introductionmentioning

confidence: 99%

Effect of Sintering Temperature on Adhesion Property and Electrochemical Activity of Pt/YSZ Electrode

et al. 2022

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“…Yttria-stabilized zirconia (YSZ) is widely employed in technical applications such as thermal barrier coatings [1][2][3], solid oxide fuel cells (SOFC) [4][5][6][7], and oxygen gas sensors [8,9]. Besides its high thermal and mechanical stability, the ionic conductivity of YSZ plays a major role in most of its applications.…”

Section: Introductionmentioning

confidence: 99%

Influence of the Sputtering Technique and Thermal Annealing on YSZ Thin Films for Oxygen Sensing Applications

et al. 2021

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Yttria-stabilized zirconia (YSZ) thin films were deposited using direct current (reactive and metallic) and radio frequency magnetron sputtering. The effect of the deposition technique and annealing treatment on the microstructure and crystallinity of the thin films was assessed. Using the films produced in this work, oxygen gas sensors were built and their performance under vacuum conditions was evaluated. All the films exhibited a cubic crystalline structure after a post-deposition thermal treatment, regardless of the sputtering technique. When the annealing treatment surpassed 1000 °C, impurities were detected on the thin film surface. The oxygen gas sensors employing the reactive and oxide-sputtered YSZ thin films displayed a proportional increase in the sensor current as the oxygen partial pressure was increased in the evaluated pressure range (5 × 10−6 to 2 × 10−3 mbar). The sensors which employed the metallic-deposited YSZ films suffered from electronic conductivity at low partial pressures.

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Low temperature preparation of YSZ-based thin-film limiting current type oxygen sensor

Jiang,

Zhang,

Yan

et al. 2023

Journal of Vacuum Science &Amp; Technology A

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Oxygen sensors based on YSZ solid electrolyte thin films have great application prospects due to their advantages in miniaturization and integration. Here, we report the gas sensing performance of Pt/YSZ/Pt oxygen gas sensors with low preparing temperatures. YSZ thin films with (200) preferred orientation have been prepared by room temperature RF magnetron sputtering combined with annealing at a temperature of 650 °C. The 700 nm-thick YSZ films exhibit an obvious limiting current platform, and the limiting current IL shows a linear dependence on oxygen concentration X(O2) (in the range of 6%–21%). Moreover, the devices with 700 nm-thick YSZ films worked well at the temperature range from 500 to 650 °C, and a linear relationship between logIL and 1000/T has been observed. These results demonstrate that YSZ thin films prepared by low temperature magnetron sputtering combined with the annealing process can reduce the working temperature.

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Effect of Annealing Temperature on Platinum/YSZ Thin Film Fabricated Using RF and DC Magnetron Sputtering

Cited by 3 publications

References 10 publications

Effect of Sintering Temperature on Adhesion Property and Electrochemical Activity of Pt/YSZ Electrode

Effect of Sintering Temperature on Adhesion Property and Electrochemical Activity of Pt/YSZ Electrode

Influence of the Sputtering Technique and Thermal Annealing on YSZ Thin Films for Oxygen Sensing Applications

Low temperature preparation of YSZ-based thin-film limiting current type oxygen sensor

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