2017
DOI: 10.1007/s10854-017-6566-6
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Effect of annealing temperature on structural, optical and humidity sensing properties of indium tin oxide (ITO) thin films

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Cited by 24 publications
(26 citation statements)
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“…ITO was successfully formed by doping Sn into In 2 O 3 , which is consistent with other studies. [26,27] Figure 3a,b shows AFM images of 100 nm ITO on the GaAs substrate. The average roughness (Ra) was 3.11 nm.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…ITO was successfully formed by doping Sn into In 2 O 3 , which is consistent with other studies. [26,27] Figure 3a,b shows AFM images of 100 nm ITO on the GaAs substrate. The average roughness (Ra) was 3.11 nm.…”
Section: Resultsmentioning
confidence: 99%
“…ITO was successfully formed by doping Sn into In 2 O 3 , which is consistent with other studies. [ 26,27 ]…”
Section: Resultsmentioning
confidence: 99%
“…Change in refractive index of the medium was also considered; however, because refractive index is a reversible phenomenon and all of the optical property measurements were taken at room temperature, it was clear that it has no effect on the shifting spectral properties. Therefore, the main factors contributing to the spectral changes of ITO were the distribution of Sn 4+ throughout In 2 O 3 , reduction of interstitial oxygen, liberation of carriers from Sn–O traps, carrier mobility, and increased order of the In 2 O 3 host matrix. ,, ,, …”
Section: Resultsmentioning
confidence: 99%
“…ITO conductive film is a semiconductor oxide material with high visible light transmission, high mechanical strength and high chemical stability, which is commonly used in industrial applications [ 21 , 22 ]. In cases 2 and 3, glass substrates are deposited with ITO films for realizing the radiator and ground plane by magnetron sputtering.…”
Section: Methodsmentioning
confidence: 99%