1993
DOI: 10.1063/1.352754
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Effect of atomic hydrogen and oxygen on diamond growth

Abstract: High-resolution electron energy loss spectroscopy has been used to investigate the effect of atomic hydrogen and oxygen on diamond growth. For a totally desorbed diamond (100) surface, atomic hydrogen corrodes carbon atoms on the surface tirst, then saturates the dangling bonds of sp3 hybridized carbon atoms on the next layer of diamond surface. But for the monohydrogenated dimerized surface, atomic hydrogen opens the elongated surface C-C dimer bonds. Oxygen abstracts adsorbed hydrogen at low substrate temper… Show more

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Cited by 30 publications
(13 citation statements)
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“…A CVD gas mixture consisting of 2% methane (CH4), 6% carbon dioxide (CO2) and 92% hydrogen (H2) was used to grow NCD films while UNCD films were synthesized using 8% CH4, 6% CO2 and 86% H2. Carbon dioxide was added to ensure effective etching of sp2 carbon phases at low temperatures [34,35]. The NCD and UNCD films were grown for 22 h and 10 h, respectively.…”
Section: Diamond Coatingmentioning
confidence: 99%
“…A CVD gas mixture consisting of 2% methane (CH4), 6% carbon dioxide (CO2) and 92% hydrogen (H2) was used to grow NCD films while UNCD films were synthesized using 8% CH4, 6% CO2 and 86% H2. Carbon dioxide was added to ensure effective etching of sp2 carbon phases at low temperatures [34,35]. The NCD and UNCD films were grown for 22 h and 10 h, respectively.…”
Section: Diamond Coatingmentioning
confidence: 99%
“…The CVD gas mixture consisting of 2% methane (CH4), 6% carbon dioxide (CO2) and 92% hydrogen (H2) was used to grow NCD films while UNCD films were synthesized using 8% CH4, 6% CO2 and 86% H2. Carbon dioxide was added to ensure effective etching of sp2 carbon phases at low temperatures [34,35]. The NCD and UNCD films were grown for 22 h and 10 h, respectively.…”
Section: Diamond Coatingmentioning
confidence: 99%
“…was added to O2. Conversely, the synergetic effect of H in CHF3 and O generated a specific etching effect on the diamond [36].…”
Section: Surface Binding Energy and Chemical Environment Analysismentioning
confidence: 99%