Effect of bias voltage on the growth of super-hard (AlCrTiVZr)N high-entropy alloy nitride films synthesized by high power impulse magnetron sputtering

Xu, Yi; Li, Guodong; Li, Guang; Gao, Fangyuan; Xia, Yuan

doi:10.1016/j.apsusc.2021.150417

Cited by 56 publications

(18 citation statements)

References 54 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Finally, possibly the most important output of the current work for industrial applications is the demonstration of the ability of reactive HiTUS to produce multicomponent coatings with mechanical properties equal to those in a similar arc and DCMS metallic and nitride coating systems [ 9 , 10 , 12 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 , 47 , 48 , 49 , 50 , 51 ] without a feedback control of target poisoning. The structures of the studied coatings, despite variations and deviations from equiatomic concentrations of TM elements at different scales, corresponded to homogeneous solid solutions regardless of the amount of nitrogen.…”

Section: Discussionmentioning

confidence: 99%

“…The application of sputtering techniques different from arc and DCMS that provide higher levels of ionization of the sputtered species, e.g., High Power Impulse Magnetron Sputtering (HiPIMS), to multicomponent nitride coatings is limited to a few studies up to now, mostly on AlCrTiVZr-N [ 24 , 25 ] and TiZrNbTFe-N systems [ 26 ]. The HiPIMS-made coatings were denser and exhibited higher hardness (41.8 GPa) than those made by DCMS (36.2 GPa).…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Reactive HiTUS TiNbVTaZrHf-Nx Coatings: Structure, Composition and Mechanical Properties

et al. 2023

View full text Add to dashboard Cite

High entropy metal sub-lattice stabilized nitride coatings based on multicomponent refractory transition metals (TM = Ti, Nb, V, Ta, Zr, Hf) are promising candidates for extreme conditions due to their high thermal, mechanical, and corrosion properties. The aims of the current work included the investigations of the possibilities of the novel High Target Utilization Sputtering (HiTUS) technique applied to reactive sputtering of TiNbVTaZrHf–xN coatings from the viewpoints of hysteresis behavior during reactive sputtering as well as the structure, composition, stoichiometry, and mechanical properties of the resulting coatings. With increasing nitrogen content, coating structures varied from amorphous in metallic alloy coatings to textured nano-columnar fcc structures. Despite certain deviations of TM from equiatomic concentrations, homogeneous solid solutions corresponding to single-phase multicomponent nitride analogous to high entropy stabilized compounds were obtained. Mechanical properties were found to be proportional to nitrogen content. The highest hardness HIT ~ 33 GPa and indentation modulus EIT ~ 400 GPa were found in a slightly sub-stoichiometric (~42 at% nitrogen) composition. HIT/EIT and limited pillar split measurements suggested that these coatings exhibit low fracture toughness (around 1 MPa.m1/2). The work confirmed that reactive HiTUS is suitable for the preparation of multicomponent nitrides with the control of their stoichiometry and mechanical properties only via nitrogen additions.

show abstract

Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Reactive HiTUS TiNbVTaZrHf-Nx Coatings: Structure, Composition and Mechanical Properties

et al. 2023

View full text Add to dashboard Cite

show abstract

“…The same group reported the synthesis of another HEF (AlCrTiVZrN) deposited by HiPIMS and a DC magnetron sputtering (DCMS) process. They revealed that the film exhibits a denser microstructure than that obtained via DCMS (Figure 3) [56]. Bachani et al reported also that a (TiZrNbTFe)N film containing 32 at.% nitrogen has a very dense microstructure [58].…”

Section: Hipimsmentioning

confidence: 96%

“…Few investigations have been reported in the literature on the study of HEFs using HiPIMS [56][57][58]. Xu et al investigated the nitrogen effect on the microstructure and mechanical properties of AlCrTiVZr HEFs [57].…”

Section: Hipimsmentioning

confidence: 99%

Recent Progress on High-Entropy Films Deposited by Magnetron Sputtering

2022

View full text Add to dashboard Cite

High-entropy films (HEFs) are of considerable interest in surface engineering applications due to their superior properties, such as good corrosion resistance, good thermal stability and excellent high temperature oxidation. Recently, the scientific community has seen an increasing development of the multicomponent coatings, improving their properties compared to conventional films. Technically, different strategies have been exploited to fabricate HEFs. Magnetron-sputtered HEFs have made significant advancements in this field. HEFs have various applications given their interesting performances. This article overviews the development and the outcome of HEFs prepared using the magnetron sputtering technique. The classification of HEFs is reported. The effect of magnetron sputtering parameters on the microstructural, mechanical, electrochemical and thermal properties of HEFs is also discussed. Applications of HEFs are reported in the last section.

show abstract

“…Laser cladding is the most frequently used technology for the manufacturing of HEA coatings [14][15][16]. HEA coatings can also be deposited by plasma cladding [17,18], plasma spray [19][20][21][22][23][24][25][26], thermal spray [27], magnetron sputtering [28][29][30][31][32][33][34][35][36][37], electric arc deposition [38], electron beam physical vapor deposition [39], and vacuum arc deposition [40][41][42][43][44]. The solidification of melted pool during laser cladding and the resulting microstructure can be strongly affected by complete or incomplete GB wetting.…”

Section: Introductionmentioning

confidence: 99%

High Entropy Alloys Coatings Deposited by Laser Cladding: A Review of Grain Boundary Wetting Phenomena

et al. 2022

View full text Add to dashboard Cite

High-entropy alloys (HEAs) are called also alloys without a main component or multiprincipal alloys. They consist of five, six or more components in more or less equal proportions and possess unique properties. Several dozens of thousands of publications have already been devoted to bulk HEAs, while HEA coatings are just beginning to develop. More than half of the works on the deposition of HEA coatings are devoted to laser cladding. In the laser cladding process, a mixture of powders on a substrate is melted in a focused laser beam, which sequentially scans the substrate. In the heated zone, the powder mixture melts. At the end of the crystallization process, a solidified polycrystal and a small amount of residual melt are found in the heated zone. It is possible that the grain boundaries (GBs) in the solidified polycrystal are incompletely or fully wetted by this liquid phase. In this way, the GB wetting with a melt determines the morphology and microstructure of HEAs coatings. This review analyzes GB wetting in single-phase HEAs, as well as in HEAs containing two or more phases. We analyze how the HEAs’ composition, laser scanning speed, laser beam power, external magnetic field or ultrasonic impact affect the microstructure and GB wetting. It is also shown how the microstructure and GB wetting change over the thickness of the rather thick as well as multilayer coatings deposited using a laser cladding.

show abstract

Effect of bias voltage on the growth of super-hard (AlCrTiVZr)N high-entropy alloy nitride films synthesized by high power impulse magnetron sputtering

Cited by 56 publications

References 54 publications

Reactive HiTUS TiNbVTaZrHf-Nx Coatings: Structure, Composition and Mechanical Properties

Reactive HiTUS TiNbVTaZrHf-Nx Coatings: Structure, Composition and Mechanical Properties

Recent Progress on High-Entropy Films Deposited by Magnetron Sputtering

High Entropy Alloys Coatings Deposited by Laser Cladding: A Review of Grain Boundary Wetting Phenomena

Contact Info

Product

Resources

About