2015 International Symposium on Next-Generation Electronics (ISNE) 2015
DOI: 10.1109/isne.2015.7132034
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Effect of channel doping profiles on performance of germanium-on-insulator based junctionless transistors

Abstract: The effect of channel doping profiles on germanium-on-insulator based junctionless transistors was investigated using Sentaurus 3D device simulator. Simulation results show that using Gaussian-function doping profile, which can be simply realized using ion implantation process, can obtain larger I on /I off ratio and smaller subthreshold slope value compared with uniform doping profile. With the increase of aspect ratio (T/W) and decrease of gate length, the effect is greater. Smaller standard deviation of Gau… Show more

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“…In this study, we investigated lateral field scalability, which is equivalent to channel length scaling, in Si and Ge JLFETs [9], by which we can determine the usability of Si CMOS and hypothesize its replacement by Ge. For simulations with high accuracy, we performed rigorous modeling for µ n and µ p of Ge.…”
Section: Introductionmentioning
confidence: 99%
“…In this study, we investigated lateral field scalability, which is equivalent to channel length scaling, in Si and Ge JLFETs [9], by which we can determine the usability of Si CMOS and hypothesize its replacement by Ge. For simulations with high accuracy, we performed rigorous modeling for µ n and µ p of Ge.…”
Section: Introductionmentioning
confidence: 99%