In order to improve interfacial bonding strength between carbon nanofibers (CNFs) and SiC matrix in CNFs/SiC composites and to disperse CNFs uniformly in the matrix, SiC coating on surface of CNFs was performed in argon atmosphere in the temperature range of 1400 to 1800°C using SiO 2 , SiO, and mixture of Si and SiO 2 powders (Si/SiO 2 powder) as silicon sources, and the modification and dispersibility of the treated CNFs were investigated. ¢-SiC particles were deposited on the surface of the CNFs in all the specimens at 16001800°C. So more SiC was formed by heating CNFs with SiO powder at 1600°C. However, the formed SiC was oxidized at higher temperature, practically, at 1800°C. This oxidation was advanced more by using SiO 2 and Si/ SiO 2 powders as silicon sources and very fine carbon fibers were observed on the surface of CNFs. The dispersibilities of CNFs heated with Si/SiO 2 and SiO powders were superior to those of as-received CNFs, CNFs treated with NaClO 3 solution and CNFs heated with SiO 2 powder, which resulted from the advanced oxidation of CNFs and the silanol group (SiOH) on surface of formed SiC.