Effect of deposition temperature on the properties of amorphous silicon carbide thin films

The effect of neutron irradiation on the properties of SiC and SiC(N) layer prepared by plasma enhanced chemical vapor deposition

“…The plasma CVD reactor with parallel plate electrodes was used as reported previously [10] silicon wafer with resistivity 2-7 cm and (1 0 0) orientation was used as the substrate for the growth of SiC layers. Technological parameters for samples were: substrate temperature for all samples was 300 • C and gas mixture was for sample S1 (SiH 4 -4 ml/min, CH 4 -20 ml/min), S2 (SiH 4 -4 ml/min, CH 4 -20 ml/min, NH 3 -1 ml/min), S3 (SiH 4 -4 ml/min, CH 4 -20 ml/min, NH 3 -3 ml/min), S4 (SiH 4 -4 ml/min, CH 4 -20 ml/min, NH 3 -5 ml/min), respectively.…”

Neutron-irradiation effect on the electrical characteristics of amorphous silicon carbide and nitrogen-doped silicon carbide films prepared by PECVD technology

“…The plasma CVD reactor with parallel-plate electrodes was used as reported previously [6] for samples preparation. A p-type silicon wafer with resistivity 2-7 V cm and (100) orientation was used as the substrate for the growth of SiC films.…”

Influence of Surface Treatment on the Conversion Efficiency of Thin-Film a-Si:H Solar Cells on a Stainless Steel Substrate

“…Over the past decade, hydrogenated amorphous silicon (a-Si:H) thin-film solar cells have emerged as a viable substitute for solid-state silicon solar cells. The a-Si:H thin-film solar cells gained importance primarily due to their low production cost, and eco-friendly nature [1][2][3]. However, these cells have the inherent disadvantage of using glass as a substrate material, which makes the cells unsuitable for use in a round shaped product, are heavy and have a high material cost.…”

“…Stainless steel has many advantages, such as low cost, high extension, ease of preparing etc. Thus it was commonly believed that the wide application of BIPVs especially rooftop applications, would be the biggest market for flexible PV technology [1][2][3][4], especially since these flexible products are very light, and quick and easy to install. Indeed, BIPV products did see a rapid growth in recent years, with more companies going into production.…”