Effect of Deposition Temperature on Surface Morphology and Electrical Properties of Fluorine Doped Tin Oxide (FTO) Thin Film by Spray Pyrolysis Technique

Abstract

Fluorine doped tin oxide (FTO) thin films were prepared at different deposition temperatures using the spray pyrolysis deposition (SPD) technique. The deposition temperature were ranging from 250°C °C to 450°C and the precursor used was 0.5M of SnCl4.5H2O and 1.527M of NH4F completely dissolved in distilled water. It was observed that the conductivity of the FTO thin film increased with increasing of deposition temperature. At 450°C, it was shown the conductivity became smaller. Surface morphologies of FTO thin films at different deposition temperature had shown that the growth of crystallite particles and its distributions were totally affected by the deposition temperature. The transmittance of FTO thin films was over 80% within the wavelength from 300 nm - 800 nm. Thus, the best deposition temperature to be used is around 350°C to 400°C for depositing the FTO film.