Thermal conductivities (k) of the individual layers of a GaN-based light emitting diode (LED) were measured along [0001] using the 3-omega method from 100-400 K. Base layers of AlN, GaN, and InGaN, grown by organometallic vapor phase epitaxy on SiC, have effective k much lower than bulk values. The 100 nm thick AlN layer has k ¼ 0.93 6 0.16 W/mK at 300 K, which is suppressed >100 times relative to bulk AlN. Transmission electron microscope images revealed high dislocation densities (4 Â 10 10 cm À2 ) within AlN and a severely defective AlN-SiC interface that cause additional phonon scattering. Resultant thermal resistances degrade LED performance and lifetime making layer-by-layer k, a critical design metric for LEDs. More than 20% of electricity in the United States is consumed by lighting. Solid-state light emitting diodes (LEDs) hold considerable potential to be more efficient and effective sources of artificial light than incandescent and fluorescent technologies. 1 Group III nitride-based blue and green LEDs are currently being developed for this purpose. Device architectures consist of light-emitting multiple quantum wells (MQWs) supported by base layers of aluminum nitride (AlN), gallium nitride (GaN), and indium gallium nitride (InGaN). The MQW itself is a periodic structure composed of alternating InGaN wells and GaN barriers.Heat generation and removal in the LED are complicated by multiple interfaces, causing high operating temperatures that degrade efficiency, shift the emission spectrum, and reduce the lifetime of LEDs. 2 Prior experimental investigations of bulk GaN and AlN have shown that thermal transport is phonon-dominated. [3][4][5][6] Previous thin film studies have been (i) based on ideal films with low defect concentrations that are unrepresentative of LED grade films 3,7 or (ii) focused on high electron mobility transistors (HEMTs), rather than LED architectures. [8][9][10] Neither submicron GaN films nor real nitride based LED devices have been investigated.Studies of Si and other thin films have demonstrated that thermal conductivity is greatly reduced when the thickness of the film or the defect spacing is less than the intrinsic mean free path of the phonons. 5,11,12 Nitride based LED structures are fabricated from multiple layers of thin films ranging from 3 nm to 100 nm in thickness; whereas, the spectrum-average phonon mean free path in GaN at 300 K is $100 nm, 13 and the longest phonon mean free paths in the spectrum are much greater. 14 To achieve economic viability, the nitride films are grown by organometallic vapor phase epitaxy (OMVPE) on foreign substrates, including SiC, sapphire, and Si. Mismatched lattice constants at the filmsubstrate interface create high densities of atomic and line defects, the latter of which that extend throughout the device as a source of phonon scattering. Given these considerations, this paper reports layer-by-layer experimental measurements of thermal conductivity in real nitride based LED architectures grown on [0001]-oriented SiC substrates. Th...