“…In electrochemical etching, an aqueous HF solution combined with ethyl alcohol is used to etch the silicon [6]. The structural properties such as size, shape of pores, porosity and thickness of porous Si layer critically depend on the etching parameters such as resistivity of the sample, HF concentration in electrolyte, sample orientation, current density and etching time [7,8]. Among these, the etching current density is a critical parameter to control the formation of porous silicon [9,10].…”