1987
DOI: 10.1063/1.339357
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Effect of He addition on fluorine-fueled excimer lasers

Abstract: Measurements were made of the effect of the He addition to XeP and KrF excimer lasers using fluorine-containing fuels. A monotonic decrease of laser output with increasing He was observed. The kinetic arguments of why this would be expected in this and other similar excimer laser systems are presented.

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