2019 Devices for Integrated Circuit (DevIC) 2019
DOI: 10.1109/devic.2019.8783740
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Effect of High-K Spacer on the Performance of Non-Uniformly doped DG-MOSFET

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Cited by 11 publications
(3 citation statements)
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“…Beyond the excess of off‐state current, the applied gate voltage causes charges to build up close to the surface. [ 16–23 ]…”
Section: Introductionmentioning
confidence: 99%
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“…Beyond the excess of off‐state current, the applied gate voltage causes charges to build up close to the surface. [ 16–23 ]…”
Section: Introductionmentioning
confidence: 99%
“…Beyond the excess of off-state current, the applied gate voltage causes charges to build up close to the surface. [16][17][18][19][20][21][22][23] The body region of the device should remain fully depleted in the junctionless transistor for proper off-state of the device. To achieve this condition, the work function difference between the gate material and substrate must be high enough so that the resulting electric field can maintain the device in a fully depleted condition.…”
Section: Introductionmentioning
confidence: 99%
“…To overcome those device fabrication problems, different approaches like multi-gate device architecture [20] and a dielectric modulating technique (replacing thinner silicon oxide (SiO 2 ) gate insulator with high-k dielectric constant material) [21] have been proposed. High-k gate oxide makes thicker equivalent oxide thickness (EOT), and it is used to over com quantum mechanical tunneling and SCEs under the nanoscale regime of gate oxide thickness [13] [22] [23]; this can be obtained using eq. (1) [13].…”
mentioning
confidence: 99%