Effect of HPPMS Pulse-Frequency on Plasma Discharge and Deposited AlTiN Coating Properties

Severin, Stefanie; Naveed, Muhammad; Weiß, Sabine

doi:10.1155/2017/4850908

Cited by 8 publications

(2 citation statements)

References 56 publications

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“…At 300 Hz, the peak current measured was 25 A, the other values were 18 A, 11.4 A, and 9.8 A for 400 Hz, 500 Hz, and 600 Hz, respectively. Thus, lower peak currents were obtained at higher frequencies, as reported in the literature 27 . The other possible explanation for the sample at 600 Hz being less thick than the sample at 500 Hz is also related to the energies of the ions that bombard the targets.…”

Section: Resultssupporting

confidence: 79%

Development of Thin Films Formed by Ti-Zr Alloys at Different Frequencies by the HiPIMS Technique

et al. 2023

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In this work, thin films based on the Ti-Zr system were studied, deposited on a silicon substrate by the magnetron sputtering technique using simultaneously a combination of High-Power Impulse Magnetron Sputtering (HiPIMS) and Direct Current Magnetron Sputtering (DCMS) sources. The objective of this work is analyzing the effect of varying HiPIMS frequency (300 Hz, 400 Hz, 500 Hz, and 600 Hz) on the characteristics and properties of the thin films. The thickness increased between 300 Hz and 500 Hz, where the thickness measured 563 nm and 732 nm, respectively; then it decreased to 709 nm at 600 Hz. Hardness and elastic moduli also tended to decrease with increasing frequency, and the results for the first property were between 7 GPa and 10.3 Gpa, while the elastic moduli were from 114 Gpa to 157 Gpa, in which lower values were reached at higher frequencies. In the wettability test, lower contact angles were observed for samples with lower frequencies due to their high surface energy, providing better hydrophilic properties.

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Section: Resultssupporting

confidence: 79%

Development of Thin Films Formed by Ti-Zr Alloys at Different Frequencies by the HiPIMS Technique

et al. 2023

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“…As is seen in the SEM images (Figure 12), the increased density of defects in the surface layer of ceramic samples formed during diamond grinding indicates that its microstructure is characterized by a high degree of heterogeneity and porosity. It can be assumed that this is a consequence of the misorientation of the grains of the deposited film and the deterioration of growth conditions of the coating, which was observed by the authors of [73][74][75] that deposited various coatings on substrates with an increased level of microroughness.…”

Section: Study Of the Index Of Defectiveness And Wear Resistance Of S...mentioning

confidence: 99%

Technological Principles of Complex Plasma-Beam Surface Treatment of Al2O3/TiC and SiAlON Ceramics

Grigoriev,

Volosova,

Lyakhovetsky

et al. 2023

JMMP

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Thermomechanical action during high-performance diamond grinding of sintered cutting Al2O3/TiC and SiAlON ceramics leads to increased defectiveness of the surface layer of the deposited TiZrN and CrAlSiN/DLC coatings. It predetermines the discontinuous and porous coatings and reduces its effectiveness under abrasive exposure and fretting wear. The developed technological approach is based on “dry” etching with beams of accelerated argon atoms with an energy of 5 keV for high-performance removal of defects. It ensures the removal of the defective layer on ceramics and reduces the index of defectiveness (the product of defects’ density per unit surface area) by several orders of magnitude, compared with diamond grinding. There are no pronounced discontinuities and pores in the microstructure of coatings. Under mechanical loads, the coatings ensure a stable boundary anti-friction film between the ceramics and counter body that significantly increases the wear resistance of samples. The treatment reduces the volumetric wear under 20 min of abrasive action by 2 and 6 times for TiZrN and CrAlSiN/DLC coatings for Al2O3/TiC and by 5 and 23 times for SiAlON. The volumetric wear under fretting wear at 105 friction cycles is reduced by 2–3 times for both coatings for Al2O3/TiC and by 3–4 times for SiAlON.

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Highly Oriented Zirconium Nitride and Oxynitride Coatings Deposited via High‐Power Impulse Magnetron Sputtering: Crystal‐Facet‐Driven Corrosion Behavior in Domestic Wastewater

et al. 2021

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Herein, highly crystalline ZrxNy and ZrxNyOz coatings are achieved by the deposition via high‐power impulse magnetron sputtering. Various N2 and N2/O2 gas mixtures with argon are investigated. The chemical composition and, as a result, mechanical properties of the deposited layer can be tailored along with morphological and crystallographic structural changes. The corrosion resistance behavior is studied by potentiodynamic measurements and electrochemical impedance spectroscopy in a sample of synthetic wastewater designed to imitate real‐life domestic wastewater. The corrosion current density of the ZrxNyOz coating is in the range of 33–70 μA cm−2, whereas for the zirconium nitride layers, values below 1.0 μA cm−2 are achieved. The highest corrosion resistance of 64 nm year−1 is observed for the ZrxNy coating deposited with 1.00% N2 content in the gas mixture with a corrosion potential of −0.41 V Ag/AgCl.

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Effect of HPPMS Pulse-Frequency on Plasma Discharge and Deposited AlTiN Coating Properties

Cited by 8 publications

References 56 publications

Development of Thin Films Formed by Ti-Zr Alloys at Different Frequencies by the HiPIMS Technique

Development of Thin Films Formed by Ti-Zr Alloys at Different Frequencies by the HiPIMS Technique

Technological Principles of Complex Plasma-Beam Surface Treatment of Al2O3/TiC and SiAlON Ceramics

Highly Oriented Zirconium Nitride and Oxynitride Coatings Deposited via High‐Power Impulse Magnetron Sputtering: Crystal‐Facet‐Driven Corrosion Behavior in Domestic Wastewater

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