Effect of humid environment on electromechanical performance of piezoelectric micromachined ultrasonic transducers (PMUTs)

Tong, Zhihao; Wu, Zhipeng; Gu, Yuandong Alex; Lou, Liang

doi:10.1016/j.sna.2023.114821

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Capacitive Micromachined Ultrasonic Transducers (Cmut) and P...1

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2024

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“…Parameters of the electrical equivalent circuit are derived using the Rayleigh-Ritz method and the results are compared with a finite element model. A similar model is described in [71] to study the effect of humidity on the performance of PMUTs. Another circuit is used for a bimorph actuator in [72] and a simplified version is proposed in [73].…”

Section: Capacitive Micromachined Ultrasonic Transducers (Cmut) and P...mentioning

confidence: 99%

Equivalent electrical circuits for electroacoustic MEMS design: a review

Liechti

2024

J. Micromech. Microeng.

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At the era of powerful computers, it’s tempting to employ finite element models early in the design phase of a device. However, especially for MEMS devices, the dimensional ratios and short wavelengths compared to the device’s dimensions, along with the involvement of multiple physics, can necessitate complex and computationally intensive models, making them impractical for optimization processes. Hence, reduced order models, like the lumped element model, are often preferred as they accurately represent complex system behavior within a defined frequency range. This review explores the use of lumped element models and their corresponding electrical equivalent circuits for simulating MEMS electro-acoustic devices, offering insights into their diverse applications within this specific domain.

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Section: Capacitive Micromachined Ultrasonic Transducers (Cmut) and P...mentioning

confidence: 99%

Equivalent electrical circuits for electroacoustic MEMS design: a review

Liechti

2024

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

Effect of humid environment on electromechanical performance of piezoelectric micromachined ultrasonic transducers (PMUTs)

Cited by 1 publication

References 34 publications

Equivalent electrical circuits for electroacoustic MEMS design: a review

Equivalent electrical circuits for electroacoustic MEMS design: a review

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