A minimum in dccp level concentration in VPE-Gal' is found which corresponds t o exceptional growth conditions near a relative maximum of the growth rate r in dependence on the GaCl input pressure p &~. The minimum occurs at the cross-over between mass flow controlled growth (at low p&rl) and surface reaction controlled growth (at high p 8 ,~: l ) .Ein Minimum in der Konzentration tiefer Zentren wird fur VPE-GaT in Abhiingigkeit vom GaC1-Eingangspartialdruck p&, gefundon. Dieses Minimum entspricht ansgezeichneten Wachstumsbedingungen in der Niihe eines relativen Maximums der Wachstumsgeschwindigkeit, das am Ubergang zwischen massentransportkontrolliertem (bei niedrigem p&a) und oberfliichenreaktionskontrollicrtem Wachstum (bei hohcm p&c1) auftritt.
I . IntroductionVPE growth conditions, particularly growth temperature and partial pressures of the reactants, strongly affect the growth characteristics and material quality of AIIIBV epitaxial layers.An important observation is, for instance, that the optimum properties of LED'S depend on the gas phase AII1/BV ratio present during the deposition process (EN-STROM e t al. ; WESSELS; STRINGFELLOW, HALL). A t certain AKI1/BV ratios maxima in minority carrier lifetimes of epitaxial layers (KUIJPERS et a].), maxima in electron mobilities (HYDRR) and niiniuin in free electron concentration8 (CLARKE) have been observed. A si tnilar behaviour is also known from LPE experiments using caontrolled vapour pressures of the B-component (NISHJZAWA et al.).The effective AI1I/BV ratio, however, is not clearly defined, since the actual ratio directly at the growing surface differs from that in the input gases. WU et al. have studied the effects of growth temperature and reactant partial pressures a t fixed ATI1/BV ratios on the efficiency of GaAso6Po.a LED'S. They found that there is a correlation with the growth regime. I n either case the diode efficiency peaks in the kinetic growth regime where the surface reaction begins t o become the rate limiting process. Obviously, the onset of surface-kinetically controlled growth marks exceptional growth conditions. This hints t o the importance of the growth mechanism for the incorporation of killer centers limiting the light output of LED'S. It is the aim of the present paper t o correlate the concentration of deep levels measured by DLTS t o the growth conditions of VPE-Gap. Increasing the GaCl input pressure a minimum in the deep level concentration has been observed. This behaviour puts some light on possible mechanisms for the defect incorporation under