Effect of ion-bombardment on the deposition of a-CNx:H films in CH4/N2 r.f. plasma

Effect of N2/CH4 flow ratio on microstructure and composition of hydrogenated carbon nitride films prepared by a dual DC-RF plasma system

“…are assigned to both C-N and C@N bonds. This is consistent with results of Liu et al [36,37]. Another sharp peak appeared around 1100 cm À1 when air was used as the background in the FTIR analysis, which was attributed to the SiO 2 present in the silicon wafer before deposition [38].…”

Nitrogen‐Rich Plasma‐Polymer Films for Biomedical Applications

“…Clearly, the spectra reveal six distinct absorption bands, namely: (I) 3 700–3 050 cm −1 ; (II) 3 000–2 800 cm −1 ; (III) 2 250–2 100 cm −1 ; (IV) 1 800–1 500 cm −1 ; (V) 1 500–1 300 cm −1 ; and (VI) 1 240–1 100 cm −1 ; their likely assignments are summarised in Table 2. Similar absorption features were reported by other authors for a‐C:HN films deposited by low‐pressure plasma polymerisation of hydrocarbons mixed with N 2 or NH 3 33, 35, 36. Since [O] values were always low (<5%), and since the extinction coefficients, k , of bands I, III, and IV increased noticeably with a rise in [N] (see Figure 5), it is believed that these three bands result from N‐containing groups: Band I is broad and contains a convolution of several peaks, assigned to NH stretching vibrations (both >NH and NH 2 ).…”

Chemical Characterisation of Nitrogen‐Rich Plasma‐Polymer Films Deposited in Dielectric Barrier Discharges at Atmospheric Pressure

“…However, the chemical derivatisation reaction of primary amines with 4‐trifluoromethylbenzaldehyde (TFBA), enables one to estimate the relative surface content of this particular functional group in PP:N by XPS, thanks to the bonded fluorine 23. Near‐edge X‐ray absorption fine structure (NEXAFS) spectroscopy is a potent technique for identifying unsaturated groups,6–11, 24–28 while Fourier‐transform infrared spectroscopy (FT‐IR) can be used to analyse peaks that are isolated on the background, for example the nitrile (or cyano‐, CN) and isonitrile (or isocyano‐, NC) constituents in PP:N near 2 200 cm −1 29–31. Elemental compositions of PP:N samples can be determined by gas chromatography of the volatile reaction products following total combustion of the PP:N samples.…”

“…Spectra of PP:N in the form of pellets or solution were acquired and their peaks in the region of 2 200 · cm −1 were fitted using the procedure described by Mutsukara;30, 31 this allowed us to separate the contributions from the nitrile and isonitrile functionalities within the 2 200 · cm −1 IR peak envelope. Finally, the [CN]/[N] (nitrile) and [NC]/[N] (isonitrile) ratios were evaluated from IR peak areas and EA data.…”