2020
DOI: 10.3390/coatings10040321
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Effect of Magnetic Field Arrangement of Facing Targets Sputtering (FTS) System on Controlling Plasma Confinement

Abstract: Conventional sputtering method uses a single cathode with a permanent magnet. Facing targets sputtering (FTS) methods consists of two cathodes. Because of a unique structure, FTS can prepare high quality films with low temperature and low plasma damage. During the film sputtering process, density and confinement of discharged plasma depend on the arrangement of a permanent magnet in the cathode. In this study, we designed two types of permanent magnet arrangements in the FTS system and the designed permanent m… Show more

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Cited by 16 publications
(10 citation statements)
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“…3 ; Table S1 ). The magnetic effect generated from non-reversed magnetic poles was almost uniform, as compared to its reversed counterpart which generated a highly discontinuous field [ 22 , 23 ]. Furthermore, magnets with reversed and non-reversed configurations also corresponded to different magnetic field waveforms, with the latter having more homogenous waveform [ 24 ].…”
Section: Resultsmentioning
confidence: 99%
“…3 ; Table S1 ). The magnetic effect generated from non-reversed magnetic poles was almost uniform, as compared to its reversed counterpart which generated a highly discontinuous field [ 22 , 23 ]. Furthermore, magnets with reversed and non-reversed configurations also corresponded to different magnetic field waveforms, with the latter having more homogenous waveform [ 24 ].…”
Section: Resultsmentioning
confidence: 99%
“…3; Table S1). The magnetic effect generated from non-reversed magnetic poles was almost uniform, as compared to its reversed counterpart which generated a highly discontinuous eld [22,23]. Furthermore, magnets with reversed and non-reversed con gurations also corresponded to different magnetic eld waveforms, with the latter having more homogenous waveform [24].…”
Section: Effect Of Magnets Arrangements On Water Parametersmentioning
confidence: 98%
“…3; Table S1). The magnetic field generated from non-reversed magnetic poles was almost uniform, as compared to its reversed counterpart which generated a highly discontinuous field [22,23]. Furthermore, magnets with reversed and non-reversed configurations also corresponded to different magnetic field waveforms, with the latter having more homogenous waveform [24].…”
Section: Effect Of Magnet Arrangements On Water Parametersmentioning
confidence: 98%