10th International Conference on Group IV Photonics 2013
DOI: 10.1109/group4.2013.6644475
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Effect of mask grid on SOI arrayed waveguide grating performance

Abstract: Abstract-We studied the impact of the lithography mask grid on the performance of silicon AWGs, and show a dramatic improvement in crosstalk of 5dB when going from a 5nm to a 1nm grid.

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Cited by 3 publications
(2 citation statements)
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“…6 and 7 show the measured spectral responses of 16×200 GHz and 16×400 GHz AWGs using 5 nm and 1 nm grid snapping. For the 16×400 GHz AWGs the crosstalk floor drops from −21 dB (for the 5 nm grid) to −26 dB (for the 1 nm grid) [14]. For the 16×200 GHz AWGs the crosstalk floor drops from −19.8 dB (for the 5 nm grid) to −22.5 dB (for the 1 nm grid).…”
Section: Designmentioning
confidence: 92%
“…6 and 7 show the measured spectral responses of 16×200 GHz and 16×400 GHz AWGs using 5 nm and 1 nm grid snapping. For the 16×400 GHz AWGs the crosstalk floor drops from −21 dB (for the 5 nm grid) to −26 dB (for the 1 nm grid) [14]. For the 16×200 GHz AWGs the crosstalk floor drops from −19.8 dB (for the 5 nm grid) to −22.5 dB (for the 1 nm grid).…”
Section: Designmentioning
confidence: 92%
“…This device is a widely used component in Wavelength Division Multiplexing (WDM) systems, and its use has expanded in other fields like signal processing, sensing and spectroscopy. SOI-based AWG are very compact, and becoming increasingly efficient [11]. An AWG wavelength demultiplexer with a single input and multiple outputs can be used as a peakdetection spectrometer: by measuring the power in the different output channels the location of a wavelength peak can be determined with such method the raw resolution is approximately the output channel spacing.…”
Section: Introductionmentioning
confidence: 99%