Effect of membrane shape on mechanical behavior of RF switches

Chauffleur, X.; Rabbia, L.; Pons, Patrick; Grenier, Katia; Plana, R.; Dantas, Luiz; Flourens, F.; Kuchenbecker, James A.; Dubuc, David; Boukabache, Ali

doi:10.1016/j.sna.2003.11.033

Cited by 7 publications

(11 citation statements)

References 11 publications

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“…In half-duplex communication system transceiver circuit, switching technology is conventionally used to build sending and receiving channels share 1 antenna in common, so that it can reduce the volume and redundancy of the circuit. RF switches are 1 of the RF signal transmission path and signal the size of the control devices used nowadays, it has wide range of applications in many areas of wireless communications, electronic warfare, radar systems (Chauffleur et al, 2004). With the development of modern wireless communication systems, mobile communications, radar, satellite communications and communications systems have higher requirements for the transceiver switch switching speed, power, capacity, integration and other aspects (Yang et al, 2011).…”

Section: Rf Switchesmentioning

confidence: 99%

Noninvasive Temperature Measurement Based on Microwave Temperature Sensor

Ding¹

2013

RJASET

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In this study, we have a research of the noninvasive temperature measurement based on microwave temperature sensor. Moreover, in order to solve the surface temperature measurement for designing microwave temperature sensor, the microwave was issued by the transmitting antenna. Microwave encountered by the measured object to return back to the measured object and then convert it into electrical signals, the use of the quantitative relationship between this signal and input noise temperature to real-time calibration. In order to calculate the antenna brightness temperature and then after signal conditioning circuit, which can show the temperature value, in order to achieve the detection of microwave temperature. Microwave-temperature measurement system hardware based on 89C51 microcontroller consists of the microwave temperature sensor, signal conditioning circuitry and chip control circuit, AD converter circuit and display circuit. The system software is by the main program, the AD conversion routines, subroutines and delay subprogram. The microwave temperature measurement characterize has: without gain fluctuations, without the impact of changes in the noise of the machine, to provide continuous calibration, wide dynamic range.

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Section: Rf Switchesmentioning

confidence: 99%

Noninvasive Temperature Measurement Based on Microwave Temperature Sensor

Ding¹

2013

RJASET

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“…Several studies on the modeling of thermal and electrostatic actuators can be found in the literature [9]. However simulations of the piezoelectrically actuated structures is not yet mature [10,11].…”

Section: Simulationsmentioning

confidence: 99%

AlN driven microcantilever actuators: modeling, fabrication, characterization

et al. 2008

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International audienceThe subject of this paper is the use of aluminum nitride (AlN) as an actuation layer in MEMS/MOEMS systems. This material shows a good piezoelectric properties related to deposition conditions. AlN is a promising candidate for the acoustic wave devices, MEMS applications and sensors what have been already proposed. Up to now, AlN is still a technological challenge and many of its micromechanical and piezoelectric properties are not precisely described. That is why our study has been focused on the determination of the material parameters like Young's modulus, residual thin film stress, piezoelectric coefficient d31 and mechanical behaviour of especially designed cantilevers. To ensure the optimum design, functionality and reliability of those actuators the theoretical solution and the numerical simulations of mechanical performance by the Finite Element Method (FEM) were performed. The created model of device takes into account multiple film stacking. For the characterization it was chosen a full-field optical technique applied in a multifunctional interferometric platform. Proposed set-up performs the measurement in static and dynamic regimes with nanometer sensitivity and high spatial resolution. The hybrid method of analysis combining the experimental and numerical results has been used to better understand the properties of these microdevices, facilitate their designing and to optimize their technological process. The optimum goal is a developing of the high quality and reliable AlN-driven cantilevers for use in MEMS/MOEMS

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“…In the following sections, we will discuss the 1-D parallel-plate actuator model, the 2 -D distributed model, and the 3 -D distributed model. [9][10][11][12][13][14][15][16].…”

Section: Fig 1 Shematic Of a Capacitive Coupling Mems Switchmentioning

confidence: 99%

“…Sswitch membrane out-of-plane profiles were obtained by certain microfabrication processes [15][16]. Such a profile affects the thermo -electro -mechanical performance of the switch significantly.…”

Section: Effects Of Initial Stressmentioning

confidence: 99%

Design of Radio Frequency (RF) MEMS Switches: Modeling

Zhu

Espinosa

2003

Microelectromechanical Systems

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Mechanical modeling of RF MEMS switches is important for performance optimization and device reliability. 1-D, 2-D, and 3-D linear analytical models have been proposed to analyze the electrostatic pull-in of a fixed-fixed beam at small deflection. However, most RF MEMS switch structures work at large deflection range. In this paper, 1-D, 2-D, and 3-D nonlinear analytical models suitable for large structural deflection are developed in a generalized form. In some practical applications, finite element models are required to account for the effects of all the design parameters: switch geometry, non-uniform state of residual stress, temperature and etc. A 3-D finite element model between structural, electrical and thermal domains is developed. This 3-D model is applicable to the design of all types of electrostatic actuators, though that of a capacitive coupling switch was examined.

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Effect of membrane shape on mechanical behavior of RF switches

Cited by 7 publications

References 11 publications

Noninvasive Temperature Measurement Based on Microwave Temperature Sensor

Noninvasive Temperature Measurement Based on Microwave Temperature Sensor

AlN driven microcantilever actuators: modeling, fabrication, characterization

Design of Radio Frequency (RF) MEMS Switches: Modeling

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