2001
DOI: 10.1016/s0022-0248(00)01016-2
|View full text |Cite
|
Sign up to set email alerts
|

Effect of methane concentration on size of charged clusters in the hot filament diamond CVD process

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
4
1

Citation Types

3
30
0

Year Published

2002
2002
2024
2024

Publication Types

Select...
8
1

Relationship

1
8

Authors

Journals

citations
Cited by 65 publications
(33 citation statements)
references
References 35 publications
3
30
0
Order By: Relevance
“…Our calculation here is consistent with experiments showing that the negatively charged clusters are likely to remain with less hydrogen adsorption. 13,38,39 Also, results in this work support our earlier assumption that the formation of diamond particles is independent of hydrogen pressure and those diamond particles are negatively charged. 5,6,13…”
Section: Fig 2 Model Geometries Of Diamond Nanoclusters ͑A͒supporting
confidence: 85%
“…Our calculation here is consistent with experiments showing that the negatively charged clusters are likely to remain with less hydrogen adsorption. 13,38,39 Also, results in this work support our earlier assumption that the formation of diamond particles is independent of hydrogen pressure and those diamond particles are negatively charged. 5,6,13…”
Section: Fig 2 Model Geometries Of Diamond Nanoclusters ͑A͒supporting
confidence: 85%
“…These measurements were done based on the previous study of Hwang et al (Hwang et al 1996;Hwang et al 2000;Hwang & Kim 2004;Huh et al 2005;Song et al 2007), who suggested that these charged nanoparticles should be a main flux for the growth of films, nanowires, and nanotubes. The generation of charged nanoparticles in the gas phase was experimentally confirmed in various CVD processes (Cheong et al 1999;Jeon et al 1999;Jeon et al 2000;Jeon et al 2001;Ahn et al 2002;Kim et al 2006). A concept similar to the two-step growth was suggested by Ostrikov (2005) in the silane plasma CVD process.…”
Section: Introductionmentioning
confidence: 91%
“…Second, the atomic diffusion should be enhanced remarkably by the presence of charge, judging from the fact that void-free crystals can grow by the building block of charged nanoparticles. Third, the diffusion enhanced by charge depends on the number of atoms per charge or the size of the charged nanoparticles, judging from the fact that small charged nuclei produced diamond crystals with well-defined facets whereas large ones produced ball-like or cauliflower structures (Jeon et al 2001b). …”
Section: Introductionmentioning
confidence: 99%