“…The tetragonal phase of ZrO 2 is suggested to be stabilized through their small crystallite size [7][8][9][10][11], and a critical size for the tetragonal phase stabilization was proposed [7,8]. Recently, the high compressive internal stress level [12][13][14] and matrix constraint [15] were reported to have effects on the critical size for tetragonal phase stabilization. The deposition conditions strongly affect the microstructure and the internal stress, which determine the tetragonal phase stabilization of the deposited films.…”