Effect of N2 flow rate on the microstructure and electrochemical behavior of TaNx films deposited by modulated pulsed power magnetron sputtering

Mendizábal, Lucía; Bayón, R.; G-Berasategui, E.; Barriga, J.; González, J.

doi:10.1016/j.tsf.2016.04.043

Cited by 27 publications

(12 citation statements)

References 31 publications

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“…So, it should be noticed that the coating with a content of 5.2% P N2 /P Ar (Sample A) possesses the inner layer least resistance (0.70 MΩ.cm 2 ) as well as the outer layer least resistance (204.16 kΩ.cm 2 ) due to cavities over the surface and the ions penetration into the solution and so exhibits the least corrosion resistance (Table 2). The corrosion resistance of formed coatings raises by increasing the time of immersion within the coating procedure, since rising the time of immersion results in a thick passive layer formation having higher corrosion resistance for the coating 46 . This characteristic is seen in the formed coatings in P N2 /P Ar 5.2%, 11.1%, and 17.6%.…”

Section: Resultsmentioning

confidence: 96%

“…The corrosion resistance of formed coatings raises by increasing the time of immersion within the coating procedure, since rising the time of immersion results in a thick passive layer formation having higher corrosion resistance for the coating. 46 This characteristic is seen in the formed coatings in P N2 /P Ar 5.2%, 11.1%, and 17.6%.…”

Section: Eis and Pdp Testsmentioning

confidence: 84%

“…Higher deposition rate of TaN magnetron sputtering is achieved as sputtering of Ta is more. In the other words, there is less amount of nitrogen inside the chamber of coating 46 …”

Section: Resultsmentioning

confidence: 99%

“…In the other words, there is less amount of nitrogen inside the chamber of coating. 46 In order to do quantitative elemental analysis and structural analysis, EDS was utilized. The results of EDS for the coatings produced in various percentages of P N2 /P Ar are illustrated in Figure 4.…”

Section: Surface Characterizationmentioning

confidence: 99%

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Studying the in vitro corrosion response of nanostructured TaN coatings in Hank's physiological solution

Babaei

Fattah‐alhosseini

Elmkhah

et al. 2021

Int J Applied Ceramic Tech

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The goal of this research is to determine the effect of N 2 pressure to argon pressure on the microstructural analysis and corrosion behavior of nanostructured TaN deposited coatings using a reactive DC-magnetron sputtering (RDCMS) technique.The samples coated microstructure was studied by the X-ray diffraction (XRD) and scanning electron microscope (SEM), and elemental distribution was studied using energy-dispersive X-ray spectroscopy (EDS). To investigate the corrosion behavior of nanostructured TaN coatings, the potentiodynamic polarization (PDP) and electrochemical impedance spectroscopy (EIS) tests were performed in Hank's physiological solution. The results of different tests revealed that the coating with a content of 17.6% P N2 /P Ar consisted of hexagonal and orthorhombic TaN phases and had denser microstructure and free pores. This coating showed superior corrosion behavior in comparison to the other ones. Also, the corrosion resistance of this coating raised by increasing the time of immersion from 48 to 168 h.

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Section: Resultsmentioning

confidence: 96%

Section: Eis and Pdp Testsmentioning

confidence: 84%

“…Higher deposition rate of TaN magnetron sputtering is achieved as sputtering of Ta is more. In the other words, there is less amount of nitrogen inside the chamber of coating 46 …”

Section: Resultsmentioning

confidence: 99%

Section: Surface Characterizationmentioning

confidence: 99%

See 2 more Smart Citations

Studying the in vitro corrosion response of nanostructured TaN coatings in Hank's physiological solution

Babaei

Fattah‐alhosseini

Elmkhah

et al. 2021

Int J Applied Ceramic Tech

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show abstract

“…The growth rate of the SEM-derived coating was 125 and 93.5 nm/min for Coatings 1A and 2N, respectively. The decrease in the coating growth rate upon the transition from argon to nitrogen sputtering atmosphere can be explained by the easier ionization of argon as compared to nitrogen [ 42 , 43 ]. Additionally, the sputtered atoms from the target experience more scattering during their flight to the substrate when a heavier working gas is used.…”

Section: Resultsmentioning

confidence: 99%

Structure and Properties of Zr-Mo-Si-B-(N) Hard Coatings Obtained by d.c. Magnetron Sputtering of ZrB2-MoSi2 Target

Kiryukhantsev-Korneev

Сытченко

Pogozhev

et al. 2021

Materials

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Coatings in a Zr-Mo-Si-B-N system were deposited by the magnetron sputtering of ZrB2-MoSi2 targets in argon and nitrogen. The structure of the coatings was investigated using scanning electron microscopy, X-ray diffraction, energy-dispersive spectroscopy, and glow-discharge optical emission spectroscopy. Mechanical and tribological properties were measured using nanoindentation and pin-on-disc testing. Oxidation resistance and oxidation kinetics were estimated via annealing in air at 1000–1500 °C and precision weight measurements. We found that the coatings deposited in Ar demonstrate a superior combination of properties, including hardness of 36 GPa, elastic recovery of 84%, a friction coefficient of 0.6, and oxidation resistance at temperatures up to 1200 °C. High oxidation resistance is realized due to the formation of the protective (SiO2 + ZrO2)/SiO2 oxide layer, which inhibits the diffusion of oxygen into the coating.

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Mechanical and Tribological Properties of NbTi-NX and NbTi-N12-CH Coatings Prepared Using Radio Frequency Magnetron Sputtering and Their Application for Micro-drills

Kao

Mao

2020

J. of Materi Eng and Perform

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Effect of N2 flow rate on the microstructure and electrochemical behavior of TaNx films deposited by modulated pulsed power magnetron sputtering

Cited by 27 publications

References 31 publications

Studying the in vitro corrosion response of nanostructured TaN coatings in Hank's physiological solution

Studying the in vitro corrosion response of nanostructured TaN coatings in Hank's physiological solution

Structure and Properties of Zr-Mo-Si-B-(N) Hard Coatings Obtained by d.c. Magnetron Sputtering of ZrB2-MoSi2 Target

Mechanical and Tribological Properties of NbTi-NX and NbTi-N12-CH Coatings Prepared Using Radio Frequency Magnetron Sputtering and Their Application for Micro-drills

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