Effect of nitrogen and ammonia on transfer and deposition of hydrocarbon radicals in different regions of hollow-cathode glow discharge

Abstract

The effect of addition of nitrogen or ammonia in an amount equal to the flow of methane entering as a 7 : 1 H 2 /CH 4 mixture into a hollow cathode dc glow flow discharge on the rate of deposition/erosion of amorphous hydrocarbon (a C:H) films at 300 K has been studied. The introduction N 2 or NH 3 into the mix ture facilitates the transition from deposition to erosion of a C(N):H films in the hollow cathode, but has a little effect on the growth rate of a C(N):H films in the positive column and in the afterglow of the discharge. It has been suggested that the changes in the a C:H film deposition/erosion rate are due to the formation of hydrogen cyanide, mainly, on the hollow cathode surface.