This study reports a novel process for the fabrication of highperformance graphite-like carbon (GLC) films on nitrided substrates through successive steps in a plasma nitriding system. Unlike films fabricated via conventional dual treatments (nitriding + film deposition), here-fabricated GLC films were grown on the surface of nitrided steel via a catalytic reaction. A transition zone having a nanocrystalline and amorphous structure was observed at the interface between the nitrided substrate and GLC films, which increased the durability of GLC films because this structure enhanced the adhesion of GLC films on the nitrided substrate, improving resistance to spallation and wear. Experimental study and first-principles calculations showed that the Fe 3 N phase had a stronger catalytic effect on GLC films than the Fe 4 N phase, and GLC films grown on the nitrided layer dominated by Fe 3 N were thicker with stronger adhesion and excellent frictional and wear properties compared with GLC films grown on the nitrided layer dominated by Fe 4 N because of the beneficial structure formed at the interface. This study reports a simple and inexpensive method to fabricate a dual layer containing high-performance GLC films via a catalytic growth and interface matching mechanism.