Effect of Polysilicon Grain Size on Gate Leakage in CMOS Manufacturing

Kong, Qiwen; Taher, C.; Bong, B. N.; Wang, H. R.; Qi, Yi; Mook, H. W.; Tham, W. H.; Kuan, H.P.

doi:10.1109/edtm.2019.8731028

2019 Electron Devices Technology and Manufacturing Conference (EDTM) 2019

DOI: 10.1109/edtm.2019.8731028

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Effect of Polysilicon Grain Size on Gate Leakage in CMOS Manufacturing

Qiwen Kong

C. Taher

B. N. Bong

et al.

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Effect of Polysilicon Grain Size on Gate Leakage in CMOS Manufacturing

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