Effect of residual stress and adhesion on the hardness of copper films deposited on silicon

LaFontaine, W. R.; Yost, B.; Li, Che‐Yu

doi:10.1557/jmr.1990.0776

Cited by 62 publications

(8 citation statements)

References 8 publications

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“…A recent study by LaFontaine et al 20 involving Vickers indentation supported this view. According to Mott19 this piled-up material supports little or no load.…”

Section: The Effect Of Displaced Materialsmentioning

confidence: 84%

A simple predictive model for spherical indentation

1993

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A simple model is described with which the entire force versus penetration behavior of indentation with a sphere, during loading and unloading, may be simulated from knowledge of the four test material parameters, Young's modulus, Poisson's ratio, flow stress at the onset of full plastic flow and strain hardening index, and the elastic properties of the indenter. The underlying mechanisms are discussed and the predictions of the model are compared with data produced by an ultra low load, penetration measuring instrument.

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“…A recent study by LaFontaine et al 20 involving Vickers indentation supported this view. According to Mott19 this piled-up material supports little or no load.…”

Section: The Effect Of Displaced Materialsmentioning

confidence: 84%

A simple predictive model for spherical indentation

1993

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“…In the past, several investigations dealing with the influence from in-plane residual stresses on the results given by a sharp indentation test have been presented, cf. e. g. Lafontaine et al [59]. The basic features of the problem were not fully understood, however, until Tsui et al [58] and Bolshakov et al [56] investigated, by using nano-indentation as well as numerical methods, the influence of applied stress on hardness, contact area and apparent elastic modulus at indentation of aluminum alloy 8009.…”

Section: Differences and Similarities Between Cone And Pyramid Indentmentioning

confidence: 99%

Modelling of sharp indentation experiments: some fundamental issues

Larsson¹

2006

Philosophical Magazine

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A relevant interpretation of sharp indentation experiments requires a fundamental understanding of the mechanics involved in the process. Such understanding can only be achieved if an appropriate mechanical model is used in order to describe the problem. These models can in rare cases be purely analytical but nowadays numerical modeling is also a vital part of a mechanical approach. Furthermore, with the development of new materials and also nanoindentation devices, material (constitutive) modeling becomes very important. The aim of the present paper is first of all to present an overview of the state of the art of modeling of sharp indentation experiments. In particular indentation of classical Mises elastoplastic behaviour but also modeling of indentation of other types of materials will be touched upon. In addition, some fundamental issues of substantial importance at indentation modeling will be discussed. These issues include 1) the influence from large deformations, 2) differences and similarities between cone and pyramid indentation results, 3) the influence from residual stresses, 4) the effective elastic modulus at indentation and 5) differences and similarities between indentation and scratch results. Most of the results presented in these discussions have been published previously in international journals but the implications of these results have, in the authors opinion, not been fully appreciated by the indentation community, or at least not sufficiently discussed.

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“…4 Numerous studies have since been conducted to examine the relationship between hardness measurement and residual stress. [5][6][7][8][9][10][11][12] In general, hardness decreases with tensile stress and increases with compressive stress, although the effects of compression are often not as large as tension and sometimes not observed. These phenomena are qualitatively explained by simple principles of plasticity.…”

Section: Introductionmentioning

confidence: 99%

Measurement of residual stress by load and depth sensing indentation with spherical indenters

2001

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A new experimental technique is presented for making measurements of biaxial residual stress using load and depth sensing indentation (nanoindentation). The technique is based on spherical indentation, which, in certain deformation regimes, can be much more sensitive to residual stress than indentation with sharp pyramidal indenters like the Berkovich. Two different methods of analysis were developed: one requiring an independent measure of the material's yield strength and the other a reference specimen in the unstressed state or other known reference condition. Experiments conducted on aluminum alloys to which controlled biaxial bending stresses were applied showed that the methods are capable of measuring the residual stress to within 10 -20% of the specimen yield stress. Because the methods do not require imaging of the hardness impressions, they are potentially useful for making localized measurements of residual stress, as in thin films or small volumes, or for characterization of point-to-point spatial variations of the surface stress.

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Effect of residual stress and adhesion on the hardness of copper films deposited on silicon

Cited by 62 publications

References 8 publications

A simple predictive model for spherical indentation

A simple predictive model for spherical indentation

Modelling of sharp indentation experiments: some fundamental issues

Measurement of residual stress by load and depth sensing indentation with spherical indenters

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