2020
DOI: 10.1088/1757-899x/872/1/012008
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Effect of residual stress on resonant frequency in Nitinol based thin film resonator

Abstract: This current work focuses on the study of residual stress introduced in thin surface micromachined films due to the thermal stress. A model is presented here to study the change in thermal residual stress as the temperature changes and in turn how this change affects the resonant frequency of the resonator. The model uses two design; a resonator with straight and folded cantilevers. This work also involves in analysing the resonator performance as the material properties are changed. The analyses is done on Ni… Show more

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Cited by 12 publications
(1 citation statement)
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“…The most popular components used throughout biomaterials are nanomaterials, polymers, as well as biocompatible. In durability, elasticity, durability, resilience, as well as thermal conduction, different metals have several benefits that promote implementations in various industries, namely physiological functions, surgical implants, dentistry, as well as biosensors [46,[54][55][56][57][58][59]. While exceptional microstructural and chemical characteristics result in economic use of composite alloys as key parts for bioinformatics use, modules, processing starts or bio -compatibility limits for specific criteria are indeed evident.…”
Section: Nano Engineering In Biomedicinementioning
confidence: 99%
“…The most popular components used throughout biomaterials are nanomaterials, polymers, as well as biocompatible. In durability, elasticity, durability, resilience, as well as thermal conduction, different metals have several benefits that promote implementations in various industries, namely physiological functions, surgical implants, dentistry, as well as biosensors [46,[54][55][56][57][58][59]. While exceptional microstructural and chemical characteristics result in economic use of composite alloys as key parts for bioinformatics use, modules, processing starts or bio -compatibility limits for specific criteria are indeed evident.…”
Section: Nano Engineering In Biomedicinementioning
confidence: 99%