Effect of rf power on the properties of ITO thin films deposited by plasma enhanced reactive thermal evaporation on unheated polymer substrates

Carvalho, C. Nunes de; Luis, A.; Conde, O.; Fortunato, Elvira; Lavareda, G.; Amaral, A.

doi:10.1016/s0022-3093(01)01140-1

Cited by 21 publications

(3 citation statements)

References 5 publications

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“…The ATO–latex coatings in this study show a much higher conductivity at the same ATO loading than those made by Wang and Anderson,27 and this may be due to the use of different ATO particles and polymers. However, the conductivity of the ATO/PVAc‐ co ‐acrylic coatings prepared here is still much lower than that of vapor‐deposited13–15 or sol–gel‐processed16, 17 ITO coatings prepared at low temperatures.…”

Section: Resultsmentioning

confidence: 71%

“…In particular, the processing conditions are not suitable for most polymers. Recently, progress has been made in lowering the processing temperature of ITO coatings so that the deposition of thermally evaporated,13, 14 ion‐plated,15 or silane‐bonded nanoparticle16, 17 ITO coatings on polymer substrates is possible. Another route to transparent conductive coatings on plastic substrates is to use composites composed of transparent conductive nanoparticles in a transparent polymer matrix.…”

Section: Introductionmentioning

confidence: 99%

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Electrical and optical properties of ceramic–polymer nanocomposite coatings

Sun

Gerberich

Francis

2003

J Polym Sci B Polym Phys

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Transparent, conductive composite coatings were fabricated from suspensions of poly(vinyl acetate-acrylic) (PVAc-co-acrylic) copolymer latices (50 -600 nm) and nanosized antimony-doped tin oxide (ATO) particles (ϳ15 nm). The suspensions were deposited as coatings onto poly(ethylene terephthalate) substrates and dried at 50°C. Microstructure studies using field emission scanning electron microscopy and tappingmode atomic force microscopy (TMAFM) indicated that the latex particles coalesced during drying and forced the ATO particles to segregate into the boundaries between the latex particles. Low phase contrast was observed with TMAFM; this result was consistent with the presence of PVAc-co-acrylic in the ATO-rich phase of the composite. The conductivity of the composite coatings followed a percolation power-law equation, with the percolation threshold between 0.05 and 0.075 volume fractions of ATO and the critical conductivity exponent ranging from 1.34 to 2.32. The highest direct-current conductivity of the composite coatings was around 10 Ϫ2 S/cm. The optical transmittance and scattering behavior of the coatings were also investigated. Compared with the PVAc-co-acrylic coating, the composite coatings had lower transparency because of the Rayleigh scattering. The transparency of the composite coatings was improved by a reduction in the coating thickness. The best transparency for the coatings with a direct-current conductivity of approximately 10 Ϫ2 S/cm was around 85% at a wavelength of 600 nm.

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Section: Resultsmentioning

confidence: 71%

Section: Introductionmentioning

confidence: 99%

Electrical and optical properties of ceramic–polymer nanocomposite coatings

Sun

Gerberich

Francis

2003

J Polym Sci B Polym Phys

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“…6 To improve the J sc of SHJ solar cells while maintaining high fill factor, it is necessary to explore and develop TCO films with better optical and electrical properties. In the past decades, the ITO films have been grown by several deposition techniques, including direct current (DC) or radiofrequency sputtering, 7,8 thermal evaporation and electron beam evaporation, 9,10 plasma-enhanced reactive thermal evaporation, 11,12 pulsed laser deposition, 13,14 and reactive plasma deposition. 15 Among them, the sputtering process is currently the most widely used technique to deposit ITO films in mass production.…”

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confidence: 99%

Power conversion efficiency of 25.26% for silicon heterojunction solar cell with transition metal element doped indium oxide transparent conductive film as front electrode

Dong¹,

Sang

Peng³

et al. 2022

Progress in Photovoltaics

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In this paper, to improve the power conversion efficiency (Eff) of silicon heterojunction (SHJ) solar cells, we developed the indium oxide doped with transition metal elements (IMO) as front transparent conductive oxide (TCO) layer combined with microcrystalline silicon (μ‐Si:H(n+)) for SHJ solar cell. The optical and electrical properties as well as structures of hydrogenated IMO (IMO:H) films were studied and compared to conventional indium tin oxide (ITO) film. Such IMO:H films have high carrier mobility over 70 cm2/V·s, high transmittance, and low free carrier absorption, which leads to a high short circuit current density exceeding 40 mA/cm2. In addition, the low sheet resistance and contact resistivity of the IMO:H films contribute to the high fill factor of the solar cell. The average Eff of solar cells with IMO:H + μ‐Si:H(n+) is improved by 0.4% compared with that of the solar cells with ITO + a‐Si:H(n+). Finally, a certified efficiency up to 25.26% (total area, 274.5 cm2) was achieved.

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Highly transparent and conductive indium tin oxide thin films for solar cells grown by reactive thermal evaporation at low temperature

Chen

Liu

et al. 2014

Appl. Phys. A

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Effect of rf power on the properties of ITO thin films deposited by plasma enhanced reactive thermal evaporation on unheated polymer substrates

Cited by 21 publications

References 5 publications

Electrical and optical properties of ceramic–polymer nanocomposite coatings

Electrical and optical properties of ceramic–polymer nanocomposite coatings

Power conversion efficiency of 25.26% for silicon heterojunction solar cell with transition metal element doped indium oxide transparent conductive film as front electrode

Highly transparent and conductive indium tin oxide thin films for solar cells grown by reactive thermal evaporation at low temperature

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