2006
DOI: 10.1016/j.tsf.2005.08.027
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Effect of Si doping on the wear properties of CrN coatings synthesized by unbalanced magnetron sputtering

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Cited by 29 publications
(16 citation statements)
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“…Thereby, in order to meet growing requirement in industry for superior coatings with good mechanical and tribological properties, academic circles have concentrated on building a composite architecture of nano-crystal dispersing into amorphous SiN x matrix . One of the most common ways is to introduce Si element into transition metalbased coatings such as TiN [6][7][8][9][10][11][12], CrN [13][14][15][16][17][18][19], ZrN [20], MoN [21], TaN [22], TiCN [23][24][25] and CrCN [26][27][28]. For instance, TiSiN coatings presented high hardness over 30 GPa due to refined grain, compact microstructure and a nano-composite architecture after Si addition [9][10][11].…”
Section: Introductionmentioning
confidence: 99%
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“…Thereby, in order to meet growing requirement in industry for superior coatings with good mechanical and tribological properties, academic circles have concentrated on building a composite architecture of nano-crystal dispersing into amorphous SiN x matrix . One of the most common ways is to introduce Si element into transition metalbased coatings such as TiN [6][7][8][9][10][11][12], CrN [13][14][15][16][17][18][19], ZrN [20], MoN [21], TaN [22], TiCN [23][24][25] and CrCN [26][27][28]. For instance, TiSiN coatings presented high hardness over 30 GPa due to refined grain, compact microstructure and a nano-composite architecture after Si addition [9][10][11].…”
Section: Introductionmentioning
confidence: 99%
“…As a result, long service life was obtained when TiSiN coatings were applied on cutting tools [6,7]. Likewise, with Si alloying, CrSiN coatings became harder than CrN coatings [13][14][15][16], and therefore, the friction coefficient and wear rate of tribopair decreased from 0.55 to 0.4 and from 11.0 Â 10 À 7 mm 3 /Nm to 5.0 Â 10 À 7 mm 3 /Nm, respectively [19]. All the above-mentioned literature indicates that amorphous SiN x in ternary TiSiN and CrSiN coatings plays an extremely important role in enhancing their mechanical and tribological properties.…”
Section: Introductionmentioning
confidence: 99%
“…On the other hand, Cr-Si-N coatings consisting of nano-sized CrN crystallites and amorphous SiN x phase have been investigated to improve their hardness and tribological properties. Many works indicated that the hardness of CrSiN coatings was higher than that of CrN coatings when the Si content below 18 at.% [35,[43][44][45][46][47][48]. Yamamoto et al [31] reported that the friction coefficient of CrSiN/CrSiN tribopairs in water varied in the range of 0.2-0.3 when the Si content was below 40 at.%.…”
Section: Introductionmentioning
confidence: 99%
“…Alloying CrN with a third element (such as Al or Si) can further significantly improve its mechanical and tribological properties. The addition of Si has been found to lead to a high H (≥ 24 GPa) [2][3][4][5][6][7][8][9][10][11][12][13][14], and to enhance anti-oxidation and improve tribological properties [14][15][16]. Most of the work on the tribological characteristics of the Cr-Si-N films has mainly focused on the friction coefficient, COF [5,9,10], while the wear rate, K, and the wear mechanisms have not been studied in detail.…”
Section: Introductionmentioning
confidence: 99%