“…Thereby, in order to meet growing requirement in industry for superior coatings with good mechanical and tribological properties, academic circles have concentrated on building a composite architecture of nano-crystal dispersing into amorphous SiN x matrix . One of the most common ways is to introduce Si element into transition metalbased coatings such as TiN [6][7][8][9][10][11][12], CrN [13][14][15][16][17][18][19], ZrN [20], MoN [21], TaN [22], TiCN [23][24][25] and CrCN [26][27][28]. For instance, TiSiN coatings presented high hardness over 30 GPa due to refined grain, compact microstructure and a nano-composite architecture after Si addition [9][10][11].…”