Fe 2 VAl-based thin-lms were prepared using radio frequency magnetron sputtering technique at various substrate temperatures up to 1073 K. At low substrate temperature below 773 K, we did not observe any evidences of L2 1 Heusler phase but the epitaxially grown B2-phase, which is considered as a chemically disordered structure of Heusler-phase. At high substrate temperatures above 773 K, L2 1 ordering became observable and its volume fraction was increased with increasing the substrate temperature. The sample deposited at 1073 K, that was considered as the highly ordered L2 1 -phase, possessed S ≈ −120 μV K −1 at around 340 K, and this value is almost the same with that previously reported for bulk samples. The power factor indicated large values exceeding 2.0 mWmat the room temperature. The thermal conductivity of Fe 2 VAl thin-lm was reduced to a half value of the bulk. As a result, the maximum gure of merit was almost doubled to 0.07 at 400 K from 0.04 of bulk samples.