Abstract:The results of experimental investigation of the relationship between low-frequency noise spectrum in an electric current through conducting filaments in Si3N4 films with thickness of 6 nm on n++-Si(001) conducting substrates and degradation characteristics of these films are reported. Two structures are investigated: (SN6) Si3N4/SiO2/Si, with 2 nm SiO2 sublayer between the film and substrate; (SN8) similar structure but without SiO2 sublayer. Detailed comparison of the structural parameters, such as average c… Show more
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