Effect of substrate temperature on properties of diamond-like films deposited by combined DC impulse vacuum-arc method

The Role of Substrate Temperature and Magnetic Filtering for DLC by Cathodic Arc Evaporation

“…The red and the blue lines in Figure 12a,b represent a linear fit of the measured values. These results are also in excellent accordance with previous works [24,27]. It can easily be seen in Figure 11b that the I(D)/I(G) ratio increases with higher substrate temperature, indicating a fundamental change in the structure of the DLC film due to increasing graphitization.…”

“…The red and the blue lines in Figure 12a,b represent a linear fit of the measured values. These results are also in excellent accordance with previous works [24,27]. Additionally, due to the strong correlation between the Raman I(D)/I(G) ratio and sp 3 -content, both the hardness and the sp 3 -content can be examined only by using visible Raman spectroscopy (Figure 12b).…”

“…Especially, the sp 2 /sp 3 ratio can be adjusted by changing the substrate temperature. In good correlation to the literature [24], this results in a linear relationship of sp 3 -content and hardness, which can be seen in Figure 12a. Moreover, both processes fit nearly in the same line showing that the hardness of DLC is closely connected to the portion of sp 3 -hybidized carbon.…”

“…Using XPS measurements, the absolute sp 2 /sp 3 ratio can be calculated by a deconvolution of the C 1s-peak in high resolution [23,24]. The C 1s peak consists of peaks due to sp 3 -carbon (285.2 eV), sp 2 -carbon (284.4 eV), and CO-contamination (286.5 eV), which can be caused by the oxygen residuals inside the vacuum chamber.…”

Influence of the substrate bias potential on the properties of ta-C coatings deposited using Venetian blind plasma filter

“…As it is known, the basic physico-mechanical properties of ta-C thin films are directly connected to the content therein of carbon atoms in sp 3 hybridization [4]. The main technological factors affecting the content of sp 3 bonds in ta-C coatings are the substrate temperature and ion energies during the process of their synthesis [5][6][7][8]. Many different designs of electromagnetic plasma filters are described in scientific publications, wherein for each filtering system a certain ion energy is indicated (which can be adjusted by changing the bias potential on the substrate), which is necessary to obtain the maximum content of carbon atoms in the sp 3 hybridization [9][10][11][12][13][14].…”