2013
DOI: 10.1155/2013/756084
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Effect of TCO/μc-Si:H Interface Modification on Hydrogenated Microcrystalline Silicon Thin-Film Solar Cells

Abstract: The effects of H2plasma exposure on optical, electrical, and structural properties of fluorine-doped tin oxide (FTO) and AZO/FTO substrates have been investigated. With increasing the time of H2-plasma exposure, the hydrogen radical and ions penetrated through the FTO surface to form more suboxides such as SnO and metallic Sn, which was confirmed by the XPS analysis. The Sn reduction on the FTO surface can be effectively eliminated by capping the FTO with a very thin layer of sputtered aluminum-doped zinc oxid… Show more

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Cited by 5 publications
(4 citation statements)
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“…The FG treatment for Si-based device is widely used [9,19,21], and the FG annealing effect and on performance of the MOS-based device are discussed in previous studies [22,26,31].…”
Section: Resultsmentioning
confidence: 99%
“…The FG treatment for Si-based device is widely used [9,19,21], and the FG annealing effect and on performance of the MOS-based device are discussed in previous studies [22,26,31].…”
Section: Resultsmentioning
confidence: 99%
“…Nevertheless, it is hard for AZO to form self-textured surface and it has to use acids etching to acquire rough crater-like morphological characteristics. On the other hand, AZO loses its excel-lent electrical conductivity when placed in an air atmosphere of over 350°C [8,14].…”
Section: Introductionmentioning
confidence: 99%
“…Transparent conductive oxide is often exposed to hydrogen-contained plasma during fabrication of thin-film silicon solar cells. The thin-film silicon solar cells are usually prepared by exposing a TCO substrate to strongly hydrogen-diluted silane plasma [ 1 ]. Replacing ITO is needed since indium in ITO is rare, toxic, and easily reduced in the environment of hydrogen plasma [ 2 , 3 ].…”
Section: Introductionmentioning
confidence: 99%