Effect of the anisotropy of monocrystalline silicon mechanical properties on the dynamic characteristics of a micromechanical gyroscope

Nesterenko, Tamara G.; Vtorushin, Sergey; Barbin, Evgenii; Koleda, A N

doi:10.1088/1757-899x/81/1/012096

Cited by 5 publications

(3 citation statements)

References 3 publications

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“…Efficiently exploiting anisotropic properties in crystals plays important roles in many areas in science and technology, ranging from timing and signal processing using a rich variety of crystalline cut orientations in quartz to the modulation and conversion of light using anisotropic crystals. In state-of-the-art miniature devices and integrated systems, crystalline anisotropy enables a number of important dynamic characteristics in microelectromechanical systems (MEMS), such as gyroscopes, rotation rate sensors, and accelerometers. − Single crystal silicon (Si), the hallmark of semiconductors and the most commonly used crystal in MEMS, possesses clear mechanical anisotropy that has been extensively characterized and utilized (e.g., Young’s moduli in the <110> and <100> directions are E Y<110> = 169 GPa and E Y<100> = 130 GPa). , As devices continue to be scaled down to nanoscale, anisotropy in mechanical properties may not always be readily preserved at device level due to lattice defects or surface effects − and thus remain largely unexplored in emerging nanoelectromechanical systems (NEMS) built upon conventional crystals.…”

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Resolving and Tuning Mechanical Anisotropy in Black Phosphorus via Nanomechanical Multimode Resonance Spectromicroscopy

et al. 2016

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Black phosphorus (P) has emerged asWang Z.H., Jia H., Zheng X.-Q., Yang R., Ye G.J., Chen X.H., Feng P.X.-L., Nano Letters 16, 5394-5400 (2016) [Accepted Version] DOI: 10.1021/acs.nanolett.6b01598, Online Publication: August 9, 2016-2-Efficiently exploiting anisotropic properties in crystals plays important roles in many areas in science and technology, ranging from timing and signal processing using a rich variety of crystalline cut orientations in quartz to the modulation and conversion of light using anisotropic crystals. In state-of-the-art miniature devices and integrated systems, crystalline anisotropy enables a number of important dynamic characteristics in microelectromechanical systems (MEMS) such as gyroscopes, rotation rate sensors, and accelerometers. 1,2,3,4 Single crystal silicon (Si), the hallmark of semiconductors and the most commonly used crystal in MEMS, possesses clear mechanical anisotropy that has been extensively characterized and utilized (e.g., Young's moduli in the <110> and <100> directions are E Y<110> = 169 GPa and E Y<100> = 130 GPa). 5 , 6 As devices continue to be scaled down to nanoscale, anisotropy in mechanical properties may not always be readily preserved at device level due to lattice defects or surface effects, 7 , 8 , 9 and thus remain largely unexplored in emerging nanoelectromechanical systems (NEMS) built upon conventional crystals.The recent advent of atomic-layer crystals offer exciting opportunities for building twodimensional (2D) NEMS using single-crystal layered materials, in which many desired material properties are preserved, or even intensified, as the crystal thickness approaches genuinely atomic scale. One unique crystal is black phosphorus (P), not only a single-element directbandgap semiconductor with bandgap depending on the number of atomic layers (covering a wide range from visible light to IR) and with high carrier mobility, but also hitherto the bestknown atomic-layer crystal with strong in-plane anisotropy. The intrinsically anisotropic lattice structure (Figure 1a) of black P dictates a number of anisotropic material properties. In particular, it is theoretically predicted to exhibit in-plane mechanical anisotropy ( Figure 1a) 10,11,12,13 much stronger than that of Si, which shall lead to previously inaccessible dynamic responses in resonant NEMS 14 and new opportunities for studying carrier-lattice interaction in atomic layers. 15,16,17,18,19 To date, while extensive and rapidly growing efforts have been devoted to studying optical and electrical properties of black P and anisotropic effects in such devices, experiments on black P mechanical devices and mechanical anisotropic effects therein have been lacking. It is therefore of both fundamental and technological importance to systematically investigate the mechanical anisotropy in black P crystal.In bulk materials, such as crystalline Si, mechanical anisotropy is often characterized by measuring the sound velocity in different directions, 20,21,22,23 and fitting data to the Christoff...

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Resolving and Tuning Mechanical Anisotropy in Black Phosphorus via Nanomechanical Multimode Resonance Spectromicroscopy

et al. 2016

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“…Micromechanical gyroscopes comprise the electromechanical and circuit modules. Its operating principle is based on the energy transfer at an angular rate of an object between the two perpendicular directions (primary and secondary oscillations) [6]. Sensor converts the angular rates of an object into changes of capacitances transformed by the circuit module, based on lock-in technique [7][8], into the output signals proportional to the measured rates.…”

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confidence: 99%

Personal navigation system based on MEMS gyroscope

Hao

Nesterenko

2017

MATEC Web Conf.

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Abstract. The paper presents a configuration of the modern personal navigation system and a new method of calculation of the distance traveled. The proposed navigation system is used to estimate a person's position and consists of three micromechanical gyroscopes: two at the knee and one at the waist. The knee attached gyroscope gives the distance traveled information, and the waist attached gyroscope gives the heading information. During the leg movement, the angular displacements of knees repeat at each period (each step of the walking person). By summing up all the stride lengths, the distance that a person has walked can be determined.

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“…Thus, for example, Tsinghua University (Peking) in cooperation with the Institute of Microelectronics developed the MMVA prototype having 27,3Hz/g sensitivity and 167,8 μg resolution [5]. The past decade has seen remarkable advances in the development of MEMS technologies owing to their high reliability and low costs [6]. …”

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confidence: 99%

Sensitivity improvement techniques for micromechanical vibrating accelerometers

Vtorushin

Nesterenko

2016

MATEC Web of Conferences

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Abstract. The paper presents the problems of detecting a desired signal generated by micromechanical vibrating accelerometer. Three detection methods, namely frequency, amplitude and phase are considered in this paper. These methods are used in micromechanical vibrating accelerometers that incorporate a force sensitive element which transforms measured acceleration into the output signal. Investigations are carried out using the ANSYS finite element program and MATLAB/Simulink support package. Investigation results include the comparative analysis of the output signal characteristics obtained by the different detection methods.

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Effect of the anisotropy of monocrystalline silicon mechanical properties on the dynamic characteristics of a micromechanical gyroscope

Cited by 5 publications

References 3 publications

Resolving and Tuning Mechanical Anisotropy in Black Phosphorus via Nanomechanical Multimode Resonance Spectromicroscopy

Resolving and Tuning Mechanical Anisotropy in Black Phosphorus via Nanomechanical Multimode Resonance Spectromicroscopy

Personal navigation system based on MEMS gyroscope

Sensitivity improvement techniques for micromechanical vibrating accelerometers

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