2010
DOI: 10.1149/1.3360604
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Effect of the Dummy Gate on the Capacitance Characteristics of the LDMOSFETs

Abstract: In this article the impact of geometrical parameters of the dummy gate on capacitance characteristics for RF-LDMOS transistors is analyzed and studied by using a 2-D numerical TCAD process and device simulator. Firstly, the device structure and fabrication process are described. Then measured and simulated capacitance characteristics of the fabricated RF-LDMOS transistors are compared, confirming the effectiveness of the TCAD simulations. On the basis of this, further extensive simulations on the device capaci… Show more

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Cited by 4 publications
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