2015
DOI: 10.1116/1.4915247
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Effect of transition metal salts on the initiated chemical vapor deposition of polymer thin films

Abstract: In this work, the effect of transition metal salts on the initiated chemical vapor deposition of polymer thin films was studied using x-ray photoelectron spectroscopy. The polymerizations of 4-vinyl pyridine and 1H,1H,2H,2H-perfluorodecyl acrylate were studied using copper(II) chloride (CuCl2) and iron(III) chloride (FeCl3) as the transition metal salts. It was found that the surface coverages of both poly(4-vinyl pyridine) (P4VP) and poly(1H,1H,2H,2H-perfluorodecyl acrylate) were decreased on CuCl2, while the… Show more

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Cited by 10 publications
(9 citation statements)
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“…The inhibition of chain growth by transition metals was also demonstrated for different types of monomers by Kwong et al [19,23]. Various metals and metal salts were found to inhibit the growth of acrylate-based polymers and poly(4-vinylpyridine) (P4VP).…”
Section: Reviewmentioning
confidence: 90%
See 1 more Smart Citation
“…The inhibition of chain growth by transition metals was also demonstrated for different types of monomers by Kwong et al [19,23]. Various metals and metal salts were found to inhibit the growth of acrylate-based polymers and poly(4-vinylpyridine) (P4VP).…”
Section: Reviewmentioning
confidence: 90%
“…Permissions: (a) was reproduced with permission from [16], copyright 2006 The Royal Society of Chemistry, (b) was reprinted with permission from [18], copyright 2000 American Chemical Society, and (c) was reprinted with permission from [19], copyright 2015, American Vacuum Society.…”
Section: Reviewmentioning
confidence: 99%
“…We demonstrated that the module could also be used to apply various polymer functionalities onto the rolling substrates by depositing x PMAA, which enables the large-scale production of paper-based microfluidic channels in a single deposition. The use of the roll-to-roll module can be extended to other applications such as large-scale patterning through the use of polymer inhibition , or UV-responsive polymers . Although we demonstrated the process for a roll of several meters, the length of the substrate can be further increased by increasing the height of the reactor with an extension collar.…”
Section: Discussionmentioning
confidence: 99%
“…A required pore-sealing process for porous dielectrics was also performed using selectively deposited parylene™ N to avoid the deposition on sub-45 nm copper nodes [ 79 ]. The copolymer poly(4-vinyl pyridine- co -divinyl benzene) was selectively deposited on a chromatography paper with screen-printed copper(II) chloride patterns [ 80 ]. A comprehensive study further examined the deposition of a wide range of functionalized poly( p -xylylenes) on high-energy metal surfaces.…”
Section: Reviewmentioning
confidence: 99%