Hydrogen peroxide is widely used in medical and industrial applications, and the rapid detection of low concentrations of its vapor is considered to be a major challenge. In this study, we have successfully implemented the fabrication of an MWCNTs/ Fe 2 O 3 :ZnO chemoresistive sensor for hydrogen peroxide vapor (HPV) detection using RF magnetron sputtering and electron-beam deposition methods. The material properties of the MWCNTs/ Fe 2 O 3 :ZnO structure were characterized in detail using scanning electron microscopy (SEM), energy-dispersive X-ray (EDX) elementary analysis, and transmission electron microscopy (TEM). The HPV sensing performances of the sensors were investigated in the temperature range 25−250 °C with and without ultraviolet (UV) irradiation. Sensor response values ranged from 35 to 1043 and from 7.3 to 198 at operating temperatures of 100 °C (without UV irradiation) and 150 °C (with UV irradiation), respectively, in the HPV concentration range of 1.5−22 ppm. Therefore, the Fe 2 O 3 :ZnO material decorated with MWCNTs is a promising candidate for integration into real-life HPV detection systems.