“…To mention a few, (2,4-dimethylpentadienyl) (ethylcyclopentadienyl)ruthenium [24], bis (2,4-dimethylpentadienyl) ruthenium [25], triruthenium dodecacarbonyl [9] and bis(2,2,6, 6-tetramethyl-heptane-3,5-dionato)(1,5-cyclooctadiene)ruthenium [26], have been applied as Ru precursors in CVD process. Bis(cyclopentadienyl)ruthenium [18][19][20], bis(ethylcyclopentadienyl)ruthenium [19,27], N,N-dimethyl-1-ruthenocene [28], 2,4-(dimethylpentadienyl) (ethylcyclopentadienyl) ruthenium, i.e. DER [29], (methylcyclopentadienyl)(pyrrolyl)ruthenium [15] or isopropylmethylbenzene-cyclohexadiene-ruthenium [2] have been adapted to ALD processes.…”