2012
DOI: 10.1002/pip.2184
|View full text |Cite
|
Sign up to set email alerts
|

Effective bulk doping concentration of diffused and undiffused silicon wafers obtained from combined photoconductance and photoluminescence measurements

Abstract: The effective doping concentration of the bulk of a silicon wafer is an important material parameter for photovoltaic applications. The techniques commonly used to measure the effective doping concentration are based on conductance or resistivity measurements and include both contacted methods, such as the four‐point probe, and contactless approaches, such as eddy current measurements. Applying these techniques to diffused wafers is complicated by the fact that the total conductance is the sum of the bulk cond… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
2
1

Citation Types

0
11
0

Year Published

2012
2012
2019
2019

Publication Types

Select...
7
1

Relationship

0
8

Authors

Journals

citations
Cited by 19 publications
(11 citation statements)
references
References 38 publications
0
11
0
Order By: Relevance
“…The stage was modified through the addition of a photodiode within the photoconductance (PC) coil, allowing simultaneous measurement of PC and PL from the same area of the wafer [27]. The combination of flash lamp and LED enabled a measurement over a wide intensity range.…”
Section: A Experimental Setupmentioning
confidence: 99%
See 1 more Smart Citation
“…The stage was modified through the addition of a photodiode within the photoconductance (PC) coil, allowing simultaneous measurement of PC and PL from the same area of the wafer [27]. The combination of flash lamp and LED enabled a measurement over a wide intensity range.…”
Section: A Experimental Setupmentioning
confidence: 99%
“…The combination of flash lamp and LED enabled a measurement over a wide intensity range. The method used for calibration of the PL signal is outlined elsewhere [15], [27], [28]. The measurements were taken with full-area illumination of the wafer to avoid an impact of nonilluminated areas on the sample lifetime [15].…”
Section: A Experimental Setupmentioning
confidence: 99%
“…The PL signal was calibrated by a comparison to the PC signal at medium to high injection, according to the method of Ref. 60. This calibration process was done once for each group of wafers; the determined calibration factors were then used for the rest of the measurements.…”
Section: B Characterizationmentioning
confidence: 99%
“…Light induced degradation. Useful techniques on incoming wafers would be Fourier transform infrared (FTIR), photoluminescence (PL) [158,159], surface photovoltage (SPV) [160], and PC/PL [161]. Table 9 summarizes useful wafer manufacturing metrology techniques for increased module reliability.…”
Section: Metrology Techniques Beneficial For Reliabilitymentioning
confidence: 99%