“…Material Fabrication and Characterization: The GeSn epilayer was grown on (001) oriented n-Ge substrate with an As doping concentration of ≈1 × 10 17 cm −3 using magnetron sputtering epitaxy technique. [40,41] Before growing GeSn, the Ge substrate was successively cleaned by acetone, ethyl alcohol, and de-ionized water in an ultrasonic bath, then was immersed into diluted hydrochloric acid solution, hydrofluoric acid solution, and de-ionized water in turn to remove the surface oxide, followed by spin-drying treatment. After that, the cleaned n-Ge substrate was fixed on the stainless-steel holder and loaded into the sputtering chamber with a base pressure of 5.0 × 10 −5 Pa.…”