“…Nowadays, with the development of technology intelligence, integration, and miniaturization, thin-film thermocouples based on Micro-Nano manufacturing technology are gradually taking the dominant position with the advantages of small size, lightweight, low power consumption, high reliability, high sensitivity, easy integration, and resistance to the harsh working environment [16][17][18][19]. In 2011, Varrenti demonstrated a 50 nm thick chromium-nickel thin-film thermocouple on a semiconductor substrate with a thin-film thermocouple with a Seebeck coefficient calibrated to 10.37 µV/ • C. The measurable temperature range is 20 • C to 160 • C. The thermal accuracy of the integrated system can be less than 1 • C and shows good repeatability of the Seebeck coefficient.…”