2003
DOI: 10.1016/s0022-0248(03)01109-6
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Effects of ammonia flow at growth temperature ramping process on optical properties of InGaN/GaN multiple quantum wells

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Cited by 10 publications
(4 citation statements)
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“…III-nitrides-based optoelectronic devices, such as light-emitting diodes (LEDs) and laser diodes (LDs), are now widely available on the market. Indium gallium nitride (InGaN)-based multi-quantum wells (MQWs) are widely used as the active layer of the LEDs and LDs because their bandgap can be tuned from ultraviolet to infrared emission spectral range (Han et al , 2003; Ji et al , 2011; Kaufmann, Lahourcade, Hourahine, Martin and Grandjean, 2016).…”
Section: Introductionmentioning
confidence: 99%
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“…III-nitrides-based optoelectronic devices, such as light-emitting diodes (LEDs) and laser diodes (LDs), are now widely available on the market. Indium gallium nitride (InGaN)-based multi-quantum wells (MQWs) are widely used as the active layer of the LEDs and LDs because their bandgap can be tuned from ultraviolet to infrared emission spectral range (Han et al , 2003; Ji et al , 2011; Kaufmann, Lahourcade, Hourahine, Martin and Grandjean, 2016).…”
Section: Introductionmentioning
confidence: 99%
“…As a result, in the MQWs of NUV-LEDs, there is less radiative recombination (Chang et al , 2003; Kim et al , 2020). The InGaN was found to be susceptible to growth conditions such as growth pressure, growth temperature, Si doping and growth termination (Han et al , 2003).…”
Section: Introductionmentioning
confidence: 99%
“…Due to the significant difference in the growth temperature, it is believed that the InGaN active layer may be damaged by high-temperature rampup step. Some research groups have reported the thermal stability of InGaN layers by studying the thermal annealing effects on InGaN film [3,4], the effect of interruption time on InGaN/GaN MQWs [5], the effect of NH 3 flow during hightemperature ramp-up step after the growth of InGaN MQWs [6], and the thermal decomposition of InGaN/GaN MQWs [7]. Nonetheless, there have been few systematic reports regarding the effect of thermal damage on the surface morphological, optical, and structural characteristics of the InGaN/InGaN MQWs by high-temperature ramp-up process.…”
Section: Introductionmentioning
confidence: 99%
“…The formation of trench defects are due to In segregation, as we reported previously. 7) It is suggested that In segregation could be suppressed by higher V/III ratio, [17][18][19][20] so the density of trench defects is suppressed by increasing the V/III ratio from 13 000 to 26 000. The V/III ratio of 26 000 is the upper limit of our MOCVD equipment, so a further increase of V/III ratio cannot be explored.…”
mentioning
confidence: 99%