“…1 illustrates the XRD patterns of Ba 4 LiTa 3 O 12 thin films deposited with various annealing temperatures. As the annealing temperature was increased, the intensities of the Ba 4 LiTa 3 O 12 peaks (031), (110), and (300) were relatively increased with the others due to higher orientation [3]. With increasing annealing temperature at the growing film surface, the kinetic energies and mobilities of the atoms also increased [5][6][7].…”