Effects of Bias Voltage on Fen Films Prepared by Magnetron Sputtering

Zeng, Yanwei; Tan, Zheng; Zhou, Lichu; Jiang, Meiya; Qiu, Yuedong; Fang, Feng; Huang, H.; Zhang, Xuhai; Jiang, Jianqing

doi:10.1590/1516-1439.334614

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“…11b During the fabrication of iron nitride phases, the method of synthesis plays a paramount importance in determining the phase and chemical composition of iron nitrides. [12][13][14][15] The process of incorporation of nitrogen into the Fe-lattice is typically known as nitridation, and presents enormous difficulties to crystallize the required iron nitride phase. 16 In general, either iron oxide or bulk iron are oen used as precursors towards producing iron nitride phases.…”

Section: Introductionmentioning

confidence: 99%

Insights into the nitridation of zero-valent iron nanoparticles for the facile synthesis of iron nitride nanoparticles

et al. 2016

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Section: Introductionmentioning

confidence: 99%

Insights into the nitridation of zero-valent iron nanoparticles for the facile synthesis of iron nitride nanoparticles

et al. 2016

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Progress in Optimization of Physical Vapor Deposition of Thin Films

Mwema

Akinlabi

Oladijo

2021

Advances in Civil and Industrial Engineering

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In this chapter, the current state of the art in optimization of thin film deposition processes is discussed. Based on the reliable and credible published results, the study aims to identify the applications of various optimization techniques in the thin film deposition processes, with emphasis on physical deposition methods. These methods are chosen due to their attractive attributes over chemical deposition techniques for thin film manufacturing. The study identifies the critical parameters and factors, which are significant in designing of the optimization algorithms based on the specific deposition methods. Based on the specific optimization studies, the chapter provides general trends, optimization evaluation criteria, and input-output parameter relationships on thin film deposition. Research gaps and directions for future studies on optimization of physical vapor deposition methods for thin film manufacturing are provided.

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Effects of Bias Voltage on Fen Films Prepared by Magnetron Sputtering

Cited by 2 publications

References 16 publications

Insights into the nitridation of zero-valent iron nanoparticles for the facile synthesis of iron nitride nanoparticles

Insights into the nitridation of zero-valent iron nanoparticles for the facile synthesis of iron nitride nanoparticles

Progress in Optimization of Physical Vapor Deposition of Thin Films

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