2017
DOI: 10.1063/1.4999899
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Effects of biased irradiation on charge trapping in HfO2 dielectric thin films

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Cited by 4 publications
(3 citation statements)
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“…The results show that there is no significant correlation between the charge variation of the oxide layer and irradiation bias, irradiation dose rate and irradiation radiation. In most cases such as Felix's [45,46] [29,30] and our previous work [31], the positive net charge will be generated in the oxide layer. In the 2nd case such as Kang's [25] work, the negative net charge will be generated in the oxide layer.…”
Section: Oxide Trapped Charge Densitymentioning
confidence: 84%
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“…The results show that there is no significant correlation between the charge variation of the oxide layer and irradiation bias, irradiation dose rate and irradiation radiation. In most cases such as Felix's [45,46] [29,30] and our previous work [31], the positive net charge will be generated in the oxide layer. In the 2nd case such as Kang's [25] work, the negative net charge will be generated in the oxide layer.…”
Section: Oxide Trapped Charge Densitymentioning
confidence: 84%
“…Compared with SiO 2 dielectrics, the high-k dielectrics are more susceptible to irradiation effects than the thermal oxides with comparable effective thickness [16]. Therefore, many works studied the characteristics of HfO 2 MOS capacitors or devices induced by gamma irradiation [23][24][25][26][27][28][29][30][31], found that traps in HfO 2 could trap holes [23-25, 27, 28, 31] or electrons [25,29,31], causing a negative or positive shift of the C-V curves, respectively. Meanwhile, the interface traps increasing was also observed [23,31] except Kang [25] and Maurya's [27,28] results, this might come from the difference in sample preparation and irradiation conditions.…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, the drain current rapidly decreases under light illumination due to the photogating effect shown in Figures b and c. Photogating effects disappear immediately along with increasing induced electrical field ( V IE ) in lightly n-doped Si, , resulting in the gate voltage to shift to 2 V + V IE shown in Figure c and Figure S3d when the light is turned off. It can be seen from Figure a that both Δ V IE and Δ V PV are very small and Δ V IE is less than Δ V PV (5 mV).…”
Section: Results and Discussionmentioning
confidence: 99%