Effects of Cl2 plasma treatment on stability, wettability, and electrical properties of ITO for OLEDs

Ion beam assisted electron beam vacuum deposition of antireflective SiO2coating on MgAl2O4spinel

“…59 This good mechanical bonding is closely related to the application of high temperature during deposition (200 • C for 40 min before deposition and 200 • C for 20 min afterwards) and ion-assisted bombardment processes. 60,61 Preplating thermal insulation makes the surface of the substrate cleaner, and the surface atoms are in a highenergy state, which improves the bonding force between nucleating atoms and the substrate. Furthermore, postcoating thermal insulation keeps the high-energy state of the coated atoms, making the coating denser and improving the bonding force between the coating and the substrate.…”

“…This good mechanical bonding is closely related to the application of high temperature during deposition (200°C for 40 min before deposition and 200°C for 20 min afterwards) and ion‐assisted bombardment processes 60,61 . Preplating thermal insulation makes the surface of the substrate cleaner, and the surface atoms are in a high‐energy state, which improves the bonding force between nucleating atoms and the substrate.…”

Surface Wettability Tuning of Acrylic Resin Photoresist and Its Aging Performance

“…Plasma treatment is a powerful way to achieve hydrophilic or hydrophobic properties for polymer surfaces. The plasma atmospheres [ 15 ] to achieve hydrophilic property include O 2 [ 16 , 17 , 18 ], N 2 [ 19 ], Cl 2 [ 20 ], Ar [ 21 , 22 ], Ar/O 2 [ 23 ], Ar/N 2 [ 23 ], and O 2 /H 2 [ 24 ], while the atmospheres for hydrophobic treatment include CF 4 [ 25 ], SF 6 [ 26 ], and Ar/SF 6 [ 23 ]. Among these atmospheres, oxygen plasma is more frequently used to form hydrophilic polymer surfaces to achieve increased wettability [ 27 ] and enhanced adhesion [ 28 ] used in microfluidic devices [ 1 , 15 ], biological fields [ 29 ], and so on.…”

Surface free energy and wettability properties of transparent conducting oxide-based films with Ag interlayer

“…In this context, controlling the surface properties such as wettability and surface free energy (SFE) of the interfaces of the designed structure within the desired range is crucial for adapting of TCO films to a specific application . In many studies, the wettability properties of a TCO surface have been modified by applying plasma treatment methods such as O 2 plasma [16][17][18][19][20][21], H 2 plasma [19], air plasma [22,23], argon plasma [16,24,25], and Cl 2 plasma [26]. For example, You and Dong treated the ITO surface with O 2 plasma, and improved the interface formation and electrical contact of the ITO electrode with the organic compound by increasing the SFE of the ITO for use in organic light emitting diodes [18].…”