Effects of current on early stages of focused ion beam nano-machining

Sabouri, Aydin; Anthony, Carl; Prewett, Philip D.; Bowen, James; Butt, Haider

doi:10.1088/2053-1591/2/5/055005

Cited by 10 publications

(16 citation statements)

References 25 publications

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“…Implanted Ga ions would modify the surface tension value and disrupt the atomic structure of the Au bulk, which could explain the significantly reduced elastic moduli calculated above. Under the experimental conditions employed in this work, the range of Ga implantation into a surface will be ~10 nm from the target location, approximated by a sum of Gaussian density distributions [14,15]. Hence, all of the experimental NWBs will all contain some implanted gallium atoms.…”

Section: Effects Of Ga Implantationmentioning

confidence: 99%

Liquid-like behaviour of gold nanowire bridges

Naik

Cheneler

Bowen

et al. 2017

Applied Physics Letters

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A combination of Focused Ion Beam (FIB) and Reactive Ion Etch (RIE) was used to fabricate free standing gold nanowire bridges with radii of 30 nm and below. These were subjected to point loading to failure at their midpoints using an Atomic Force Microscope (AFM), providing strength and deformation data. The results demonstrate a dimensionally dependent transition from conventional solid metallic properties to liquid-like behaviour including the unexpected reformation of a fractured bridge. The work reveals mechanical and materials properties of nanowires which could have significant impact on nanofabrication processes and nanotechnology devices such as Nano Electro Mechanical Systems (NEMS). , who observed liquid behaviour with hydrodynamic instabilities for nanowires with radii below a critical radius of approximately 25 nm. These liquid-like instabilities and the critical radius of the nanowires below which bulk material properties no longer apply in a simple form have not been widely studied, due in part to the difficulty of fabricating nanowires below 25 nm in radius. INTRODUCTION

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Section: Effects Of Ga Implantationmentioning

confidence: 99%

Liquid-like behaviour of gold nanowire bridges

Naik

Cheneler

Bowen

et al. 2017

Applied Physics Letters

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“…Surface topography measurement also detects the marks left on a specimen in trying to achieve the shape, such as those created by machining or polishing. Surface metrology is also highly relevant to nanotechnology and micro/nanofabrication, for example assessing the structure of thin films manufactured using vapour deposition [2][3][4], or using focused ion beam to etch surfaces [5][6]. Researchers in these fields represent a range of scientific and engineering disciplines, and hence may be unfamiliar with the complexities of measuring surface topography.…”

Section: Introductionmentioning

confidence: 99%

Selecting suitable image dimensions for scanning probe microscopy

Bowen

Cheneler

2017

Surfaces and Interfaces

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The use of scanning probe microscopy to acquire topographical information from surfaces with nanoscale features is now a common occurrence in scientific and engineering research. Image sizes can be orders of magnitude greater than the height of the features being analysed, and there is often a trade-off between image quality and acquisition time. This work investigates a commonly encountered problem in nanometrology-how to choose a scan size which is representative of the entire sample. The topographies of a variety of samples are investigated, including metals, polymers, and thin films.

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“…Laser ablation compared to lithography/e-beam milling for fabrication of micro/nano structures is known as a faster method, moreover, it requires less number of processing steps. 9,10 Laser ablation has been utilized to create optical devices operating in the visible region. 11,12 Direct laser writing procedures have low energy requirements and rapid production times not only for 1D but also for 2D nanostructures.…”

Section: Introductionmentioning

confidence: 99%